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Volumn 158, Issue 4, 2011, Pages

Characterization of K and Na-sensitive membrane fabricated by CF 4 plasma treatment on hafnium oxide thin films on ISFET

(8) Lu, Tseng Fu a Yang, Chia Ming b Wang, Jer Chyi a Ho, Kuan I a Chin, Chi Hung a Pijanowska, Dorota G c Jaroszewicz, Bohdan d Lai, Chao Sung a

a CHANG GUNG UNIVERSITY (Taiwan)

b Inotera Memories (Taiwan)

c INSTITUTE OF BIOCYBERNETICS AND BIOMEDICAL ENGINEERING (Poland)

d ukasiewicz Research Network Institute of Microelectronics and Photonics (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ALKALI ION; BIOSENSOR APPLICATIONS; CHEMICAL STATE; COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES; CONCENTRATION RANGES; FLUORINE ATOMS; HAFNIUM OXIDE THIN FILMS; ION DETECTION; LOW POWER; PLASMA PROCESS; PLASMA TREATMENT; POST-DEPOSITION; SELECTIVITY COEFFICIENT; SENSING LAYERS; SENSING PERFORMANCE; SENSITIVITY CHANGES; STABILITY TESTS; TIME-DEPENDENT;

ATOMIC SPECTROSCOPY; BIOSENSORS; DIELECTRIC MATERIALS; FIELD EFFECT TRANSISTORS; FLUORINE; HAFNIUM; HAFNIUM OXIDES; ION SENSITIVE FIELD EFFECT TRANSISTORS; IONS; METALLIC COMPOUNDS; MOS DEVICES; OXIDE FILMS; PLASMA STABILITY; PLASMAS; SEMICONDUCTOR DEVICE MANUFACTURE; SENSITIVITY ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA APPLICATIONS;

EID: 79955130541 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.3543922 Document Type: Article

Times cited : (21)

References (31)

1
- 0036737145
- 10.1016/S0928-4931(02)00054-1
- A. Errachid, J. Bausells, N. Zine, H. Jaffrezic, C, Martelet, N. Jaffrezic-Renault, and M. Charbonnier, Mater. Sci. Eng., C, 21, 9 (2002). 10.1016/S0928-4931(02)00054-1
- (2002) Mater. Sci. Eng., C , vol.21 , pp. 9
- Errachid, A.¹ Bausells, J.² Zine, N.³ Jaffrezic, H.⁴ Martelet, C.⁵ Jaffrezic-Renault, N.⁶ Charbonnier, M.⁷

2
- 33645241641
- S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, Proc. SPIE, 6037, 60370J1 (2006).
- (2006) Proc. SPIE , vol.6037
- Khumpuang, S.¹ Horade, M.² Fujioka, K.³ Sugiyama, S.⁴

3
- 0035974966
- Multisensor system on the basis of an array of non-specific chemical sensors and artificial neural networks for determination of inorganic pollutants in a model groundwater
- DOI 10.1016/S0039-9140(01)00444-1, PII S0039914001004441
- A. Rudnitskaya, A. Ehlert, A. Legin, Yu. Vlasov, and S. Bttgenbach, Talanta, 55, 425 (2001). 10.1016/S0039-9140(01)00444-1 (Pubitemid 32756734)
- (2001) Talanta , vol.55 , Issue.2 , pp. 425-431
- Rudnitskaya, A.¹ Ehlert, A.² Legin, A.³ Vlasov, Yu.⁴ Buttgenbach, S.⁵

4
- 0037366317
- 10.1016/S0925-4005(02)00464-1
- J. Artigas, C. Jiménez, C. Domnguez, S. Mnguez, A. Gonzalo, and J. Alonso, Sens. Actuators B, 89, 199 (2003). 10.1016/S0925-4005(02)00464-1
- (2003) Sens. Actuators B , vol.89 , pp. 199
- Artigas, J.¹ Jiménez, C.² Domnguez, C.³ Mnguez, S.⁴ Gonzalo, A.⁵ Alonso, J.⁶

5
- 0037407857
- 10.1016/S0039-9140(03)00028-6
- J. Alonso, J. Artigas, and C. Jiménez, Talanta, 59, 1245 (2003). 10.1016/S0039-9140(03)00028-6
- (2003) Talanta , vol.59 , pp. 1245
- Alonso, J.¹ Artigas, J.² Jiménez, C.³

6
- 0014698380
- 10.1109/TBME.1970.4502688
- P. Bergveld, IEEE Trans. Biomed. Eng., BME-17, 70 (1970). 10.1109/TBME.1970.4502688
- (1970) IEEE Trans. Biomed. Eng. , vol.17 , pp. 70
- Bergveld, P.¹

7
- 33845770682
- A novel, low power biosensor for real time monitoring of creatinine and urea in peritoneal dialysis
- DOI 10.1016/j.snb.2006.03.051, PII S0925400506002449
- B. Premanode and C. Toumazou, Sens. Actuators B, 120, 732 (2007). 10.1016/j.snb.2006.03.051 (Pubitemid 46001561)
- (2007) Sensors and Actuators, B: Chemical , vol.120 , Issue.2 , pp. 732-735
- Premanode, B.¹ Toumazou, C.²

8
- 53049083320
- 10.1016/j.bios.2008.05.006
- D. Goncalves, D. M. F. Prazeres, V. Chu, and J. P. Conde, Biosens. Bioelectron., 24, 545 (2008). 10.1016/j.bios.2008.05.006
- (2008) Biosens. Bioelectron. , vol.24 , pp. 545
- Goncalves, D.¹ Prazeres, D.M.F.² Chu, V.³ Conde, J.P.⁴

9
- 40449097219
- ISFET and fiber optic sensor technologies: In vivo experience for critical care monitoring
- DOI 10.1021/cr068120y
- B. A. McKinley, Chem. Rev., 108, 826 (2008). 10.1021/cr068120y (Pubitemid 351344457)
- (2008) Chemical Reviews , vol.108 , Issue.2 , pp. 826-844
- McKinley, B.A.¹

10
- 52649112132
- 10.1149/1.2977720
- C.-M. Yang, C.-S. Lai, T.-F. Lu, T.-C. Wang, and D. G. Pijanowska, J. Electrochem. Soc., 155, J326 (2008). 10.1149/1.2977720
- (2008) J. Electrochem. Soc. , vol.155 , pp. 326
- Yang, C.-M.¹ Lai, C.-S.² Lu, T.-F.³ Wang, T.-C.⁴ Pijanowska, D.G.⁵

11
- 73149112404
- 10.1016/j.snb.2009.09.037
- C.-S. Lai, T.-F. Lu, C.-M. Yang, Y. C. Lin, D. G. Pijanowska, and B. Jaroszewicz, Sens. Actuators B, 143, 494 (2010). 10.1016/j.snb.2009.09.037
- (2010) Sens. Actuators B , vol.143 , pp. 494
- Lai, C.-S.¹ Lu, T.-F.² Yang, C.-M.³ Lin, Y.C.⁴ Pijanowska, D.G.⁵ Jaroszewicz, B.⁶

12
- 33646907945
- 2 sensing dielectric improved by rapid thermal annealing
- DOI 10.1143/JJAP.45.3807
- C.-S. Lai, C.-M. Yang, and T.-F. Lu, Jpn. J. Appl. Phys., 45, 3807 (2006). 10.1143/JJAP.45.3807 (Pubitemid 43794297)
- (2006) Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers , vol.45 , Issue.4 B , pp. 3807-3810
- Lai, C.-S.¹ Yang, C.-M.² Lu, T.-F.³

13
- 31044451906
- PH sensitivity improvement on 8 nm thick hafnium oxide by post deposition annealing
- DOI 10.1149/1.2163550
- C.-S. Lai, C.-M. Yang, and T.-F. Lu, Electrochem. Solid-State Lett., 9, G90 (2006). 10.1149/1.2163550 (Pubitemid 43121742)
- (2006) Electrochemical and Solid-State Letters , vol.9 , Issue.3
- Lai, C.-S.¹ Yang, C.-M.² Lu, T.-F.³

14
- 4544273150
- 10.1049/el:20045388
- W.-Y. Chung, C.-H. Yang, D.G. Pijanowska, A. Krzyskow, and W. Torbicz, Electron. Lett., 40, 1115 (2004). 10.1049/el:20045388
- (2004) Electron. Lett. , vol.40 , pp. 1115
- Chung, W.-Y.¹ Yang, C.-H.² Pijanowska, D.G.³ Krzyskow, A.⁴ Torbicz, W.⁵

15
- 0035368347
- Study on the temperature effect, hysteresis and drift of pH-ISFET devices based on amorphous tungsten oxide
- DOI 10.1016/S0925-4005(01)00657-8, PII S0925400501006578
- J.-L. Chiang, S.-S. Jan, J.-C. Chou, and Y.-C. Chen, Sens. Actuators B, 76, 624 (2001). 10.1016/S0925-4005(01)00657-8 (Pubitemid 32513944)
- (2001) Sensors and Actuators, B: Chemical , vol.76 , Issue.1-3 , pp. 624-628
- Chiang, J.-L.¹ Jan, S.-S.² Chou, J.-C.³ Chen, Y.-C.⁴

16
- 0037199904
- 10.1016/S0925-4005(02)00147-8
- J.-C. Chou and Y.-F. Wang, Sens. Actuators B, 86, 58 (2002). 10.1016/S0925-4005(02)00147-8
- (2002) Sens. Actuators B , vol.86 , pp. 58
- Chou, J.-C.¹ Wang, Y.-F.²

17
- 0023842694
- Isfet's with ion-sensitive membranes fabricated by ion implantation
- DOI 10.1109/16.2415
- T.x Ito, H. Inagaki, and I. Igarashi, IEEE Trans. Electron Devices, 35, 56 (1988). 10.1109/16.2415 (Pubitemid 18596138)
- (1988) IEEE Transactions on Electron Devices , vol.35 , Issue.1 , pp. 56-64
- Ito Tadashi¹ Inagaki Hazime² Igarashi Isemi³

18
- 0033904106
- Sensitive cyclodextrin-polysiloxane gel membrane on EIS structure and ISFET for heavy metal ion detection
- DOI 10.1016/S0925-4005(00)00294-X
- M. B. Ali, R. Kalfat, S. Sfihi, J. M. Chovelon, H. B. Ouada, and N. Jaffrezic-Renault, Sens. Actuators B, 62, 233 (2000). 10.1016/S0925-4005(00) 00294-X (Pubitemid 30561137)
- (2000) Sensors and Actuators, B: Chemical , vol.62 , Issue.3 , pp. 233-237
- Ali, M.B.¹ Kalfat, R.² Sfihi, H.³ Chovelon, J.M.⁴ Ouada, H.B.⁵ Jaffrezic-Renault, N.⁶

19
- 29044437465
- Measurement and comparison of potentiometric selectivity coefficients of urea biosensors based on ammonium ion-selective electrodes
- DOI 10.1109/JSEN.2005.857881
- N.-H. Chou, J.-C. Chou, T.P. Sun, and S.-K. Hsiung, IEEE Sens. J., 5, 1362 (2005). 10.1109/JSEN.2005.857881 (Pubitemid 41788503)
- (2005) IEEE Sensors Journal , vol.5 , Issue.6 , pp. 1362-1368
- Chou, N.H.¹ Chou, J.C.² Sun, T.P.³ Hsiung, S.K.⁴

20
- 54249116847
- 10.1143/JJAP.47.2345
- K. Tai, S. Yamaguchi, K. Tanaka, T. Hirano, I. Oshiyama, S. Kazi, T. Ando, M. Nakata, and M. Yamanaka, Jpn. J. Appl. Phys., 47, 2345 (2008). 10.1143/JJAP.47.2345
- (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 2345
- Tai, K.¹ Yamaguchi, S.² Tanaka, K.³ Hirano, T.⁴ Oshiyama, I.⁵ Kazi, S.⁶ Ando, T.⁷ Nakata, M.⁸ Yamanaka, M.⁹

21
- 63649083660
- 10.1149/1.3089976
- W. J.x Maeng, J. Y. Son, and H. Kim, J. Electrochem. Soc., 156, G33 (2009). 10.1149/1.3089976
- (2009) J. Electrochem. Soc. , vol.156 , pp. 33
- Maeng, W.J.X.¹ Son, J.Y.² Kim, H.³

22
- 33847745031
- K. Seo, R. Sreenivasan, P. C. McIntyre, and K. C. Saraswat, Tech. Dig.-Int. Electron Devices Meet., 2005, 417
- (2005) Tech. Dig. - Int. Electron Devices Meet. , pp. 417
- Seo, K.¹ Sreenivasan, R.² McIntyre, P.C.³ Saraswat, K.C.⁴

23
- 33847739339
- M. Inoue, S. Tsujikawa, M. Mizutani, K. Nomura, T. Hayashi, K. Shiga, J. Yugami, J. Tsuchimoto, Y. Ohno, and M. Yoneda, Tech. Dig.-Int. Electron Devices Meet., 2005, 413.
- (2005) Tech. Dig. - Int. Electron Devices Meet , pp. 413
- Inoue, M.¹ Tsujikawa, S.² Mizutani, M.³ Nomura, K.⁴ Hayashi, T.⁵ Shiga, K.⁶ Yugami, J.⁷ Tsuchimoto, J.⁸ Ohno, Y.⁹ Yoneda, M.¹⁰

24
- 21244471082
- 2 thin film
- DOI 10.1143/JJAP.44.2307, Solid State Devices and Materials
- C.-S. Lai, W.-C. Wu, K.-M. Fan, J.-C. Wang, and S.-J. Lin, Jpn. J. Appl. Phys., 44, 2307 (2005). 10.1143/JJAP.44.2307 (Pubitemid 40892670)
- (2005) Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers , vol.44 , Issue.4 B , pp. 2307-2310
- Lai, C.S.¹ Wu, W.C.² Fan, K.M.³ Wang, J.C.⁴ Lin, S.J.⁵

25
- 34249870836
- 4 plasma treatment
- DOI 10.1149/1.2733873
- W.-C. Wu, C.-S. Lai, J.C. Wang, J.-H. Chen, M.-W. Ma, and T.-S. Chao, J. Electrochem. Soc., 154, H561 (2007). 10.1149/1.2733873 (Pubitemid 46872265)
- (2007) Journal of the Electrochemical Society , vol.154 , Issue.7
- Wu, W.C.¹ Lai, C.S.² Wang, J.C.³ Chen, J.H.⁴ Ma, M.W.⁵ Chao, T.S.⁶

26
- 20844461459
- 2 gate dielectrics with TaN metal gate
- DOI 10.1063/1.1944230, 222905
- C.-S. Lai, W.-C. Wu, J.-C. Wang, and T.-S. Chao, Appl. Phys. Lett., 86, 222905 (2005). 10.1063/1.1944230 (Pubitemid 40861614)
- (2005) Applied Physics Letters , vol.86 , Issue.22 , pp. 1-3
- Lai, C.S.¹ Wu, W.C.² Wang, J.C.³ Chao, T.S.⁴

27
- 33749991125
- First principles calculations of oxygen vacancy passivation by fluorine in hafnium oxide
- DOI 10.1063/1.2358121
- W. Chen, Q.-Q. Sun, S.-J. Ding, D.-W. Zhang, L.-K. Wang, Appl. Phys. Lett., 89, 152904 (2006). 10.1063/1.2358121 (Pubitemid 44570583)
- (2006) Applied Physics Letters , vol.89 , Issue.15 , pp. 152904
- Chen, W.¹ Sun, Q.-Q.² Ding, S.-J.³ Zhang, D.W.⁴ Wang, L.-K.⁵

28
- 33749489613
- 2 gate oxide by fluorine
- DOI 10.1063/1.2360190
- K. Tse and J. Robertson, Appl. Phys. Lett., 89, 142914 (2006). 10.1063/1.2360190 (Pubitemid 44522250)
- (2006) Applied Physics Letters , vol.89 , Issue.14 , pp. 142914
- Tse, K.¹ Robertson, J.²

29
- 76549116438
- 10.1149/1.3206621
- S. J. Ding, Y. J. Huang, Q. Q. Sun, and W. Zhang, ECS Trans., 25 (6), 209 (2009). 10.1149/1.3206621
- (2009) ECS Trans. , vol.25 , Issue.6 , pp. 209
- Ding, S.J.¹ Huang, Y.J.² Sun, Q.Q.³ Zhang, W.⁴

30
- 79955139053
- 10.1116/1.584468
- J. H. Thomas III, J. Vac. Sci. Technol. B, 7, 1236 (1989). 10.1116/1.584468
- (1989) J. Vac. Sci. Technol. B , vol.7 , pp. 1236
- Thomas Iii, J.H.¹

31
- 0346900405
- 10.1116/1.577646
- A. C. Miller, F. P. McCluskey, and J. A. Taylor, J. Vac. Sci. Technol. A, 9, 1461 (1991). 10.1116/1.577646
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 1461
- Miller, A.C.¹ McCluskey, F.P.² Taylor, J.A.³

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