Influence of nitrogen doping on thermal stability of fluorinated amorphous carbon thin films

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 16, Issue 1, 2006, Pages 54-58

  Liu, Xiong Fei ^a   Zhou, Xin ^a   Gao, Jin Ding ^a  

^a CENTRAL SOUTH UNIVERSITY   (China)

Author keywords

Fluorinated amorphous carbon films; Nitrogen doping; Thermal stability

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CARBON; DOPING (ADDITIVES); FLUORIDATION; MORPHOLOGY; NITROGEN; THERMODYNAMIC STABILITY;

AROMATIC RINGS STRUCTURE; CHEMICAL STRUCTURE; FLUORINATED AMORPHOUS CARBON FILMS; NITROGEN DOPING; THERMAL STABILITY;

DIELECTRIC FILMS;

EID: 33745123690     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1003-6326(06)60010-1     Document Type: Article

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