Nitrogen doping of fluorinated amorphous carbon thin films: Structural and optical properties evolution upon thermal annealing

Thin Solid Films

Volumn 408, Issue 1-2, 2002, Pages 291-296

  Valentini, L ^a   Braca, E ^a   Kenny, J M ^a   Fedosenko, G ^b   Engemann, J ^b   Lozzi, L ^c   Santucci, S ^c  

^a UNIVERSITY OF PERUGIA   (Italy)

^b Forschungszentrum Fur Mikrostrukturtechnik   (Germany)

^c UNIVERSITY OF L'AQUILA   (Italy)

Author keywords

Annealing; Nitrogen doping; Optical properties; Raman scattering

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CARBON; DESORPTION; DIMENSIONAL STABILITY; DOPING (ADDITIVES); FILM GROWTH; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; X RAY PHOTOELECTRON SPECTROSCOPY;

NITROGEN DOPING;

THIN FILMS;

EID: 0037012514     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00084-6     Document Type: Article

References (25)