SCOPUS 정보 검색 플랫폼

Materials Technology

Volumn 26, Issue 1, 2011, Pages 28-31

Effects of sputtering pressure on properties of copper oxide thin films prepared by rf magnetron sputtering

(3) Darma, T H a Ogwu, A A a Placido, F a

a UNIVERSITY OF THE WEST OF SCOTLAND (United Kingdom)

Author keywords

Copper oxide; Rf magnetron sputtering; Sputtering pressure; Thin films

Indexed keywords

AFM; COPPER OXIDE THIN FILMS; CUPROUS OXIDE; FOUR-POINT PROBE MEASUREMENTS; GLASS SUBSTRATES; OPTICAL AND ELECTRICAL PROPERTIES; PROCESS PARAMETERS; RF MAGNETRON SPUTTERING; SEM; SEMICONDUCTING MATERIALS; SINGLE PHASE; SPUTTERING PRESSURE; SPUTTERING PRESSURES; XRD;

COPPER; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; MEASUREMENTS; OXIDE FILMS; OXYGEN; SEMICONDUCTING FILMS; SUBSTRATES; THIN FILMS;

FILM PREPARATION;

EID: 79953200497 PISSN: 10667857 EISSN: None Source Type: Journal
DOI: 10.1179/175355511X12941605982226 Document Type: Article

Times cited : (12)

References (33)

1
- 0037446055
- J. F. Pierson, A. Thobor-Kecka and A. Billard: Appl. Surf. Sci., 2003, 210, 359-367.
- (2003) Appl. Surf. Sci. , vol.210 , pp. 359-367
- Pierson, J.F.¹ Thobor-Kecka, A.² Billard, A.³

2
- 0036722434
- H. Derin and K. Kantarli: Appl. Phys. A, 2002, 75A, 391-395.
- (2002) Appl. Phys. A , vol.75 A , pp. 391-395
- Derin, H.¹ Kantarli, K.²

3
- 12844273585
- A. A. Ogwu, E. Bouquerel, O. Ademosu, S. Moh, E. Crossan and F. Placido: J. Phys. D: Appl. Phys., 2005, 38, 266-271.
- (2005) J. Phys. D: Appl. Phys. , vol.38 , pp. 266-271
- Ogwu, A.A.¹ Bouquerel, E.² Ademosu, O.³ Moh, S.⁴ Crossan, E.⁵ Placido, F.⁶

4
- 0035929032
- B. Balamurugan and B. R. Mehta: Thin Solid Films, 2001, 396, 90-96.
- (2001) Thin Solid Films , vol.396 , pp. 90-96
- Balamurugan, B.¹ Mehta, B.R.²

5
- 0020253746
- L. C. Olsen, F.W. Addis and W. Miller: Solar Cells, 1982, 7, (3) 247-279.
- (1982) Solar Cells , vol.7 , Issue.3 , pp. 247-279
- Olsen, L.C.¹ Addis, F.W.² Miller, W.³

6
- 33646859689
- K. Akimoto, S. Ishizuka, M. Yanagita, Y. Nawa, G. K. Paul and T. Sakurai: Solar Energy, 2006, 80, 715-722.
- (2006) Solar Energy , vol.80 , pp. 715-722
- Akimoto, K.¹ Ishizuka, S.² Yanagita, M.³ Nawa, Y.⁴ Paul, G.K.⁵ Sakurai, T.⁶

7
- 0032570369
- A. O. Musa, T. Akomolafe and M. J. Carter: Solar Energy Mater. Solar Cells, 1998, 51, (3-4), 305-316.
- (1998) Solar Energy Mater. Solar Cells , vol.51 , Issue.3-4 , pp. 305-316
- Musa, A.O.¹ Akomolafe, T.² Carter, M.J.³

8
- 0032694751
- Z. Hiroi: Micron, 1999, 30, 491-506.
- (1999) Micron , vol.30 , pp. 491-506
- Hiroi, Z.¹

9
- 14944363791
- May 2005
- D. Matsunaka, E. T. Rodulfo and H. Kasai: Solid State Communications, 2005, 134, (5) (May 2005), 355.
- (2005) Solid State Communications , vol.134 , Issue.5 , pp. 355
- Matsunaka, D.¹ Rodulfo, E.T.² Kasai, H.³

10
- 34250868019
- M. Ristova, R. Neskovska and V. Mirčeski: Solar Energy Mater. Solar Cells, 2007, 91, 1361-1365.
- (2007) Solar Energy Mater. Solar Cells , vol.91 , pp. 1361-1365
- Ristova, M.¹ Neskovska, R.² Mirčeski, V.³

11
- 0347051720
- G. Correa and R. Almanza: Solar Energy, 2004, 76, 111-115.
- (2004) Solar Energy , vol.76 , pp. 111-115
- Correa, G.¹ Almanza, R.²

12
- 67949089542
- D. Barreca, E. Comini, A. Gasparotto, C. Maccato, C. Sada, G. Sberveglieri and E. Tondello: Sens. Actuators B, 2009, 141B, 270-275.
- (2009) Sens. Actuators B , vol.141 B , pp. 270-275
- Barreca, D.¹ Comini, E.² Gasparotto, A.³ MacCato, C.⁴ Sada, C.⁵ Sberveglieri, G.⁶ Tondello, E.⁷

13
- 29244464312
- S. T. Shishiyanu, T. S. Shishiyanu and O. I. Lupan: Sens. Actuators B, 2006, 113B, 468-476.
- (2006) Sens. Actuators B , vol.113 B , pp. 468-476
- Shishiyanu, S.T.¹ Shishiyanu, T.S.² Lupan, O.I.³

14
- 57849083591
- L. Huang, F. Peng, H. Yu and H. Wang: Solid State Sci., 2009, 11, 129-138.
- (2009) Solid State Sci. , vol.11 , pp. 129-138
- Huang, L.¹ Peng, F.² Yu, H.³ Wang, H.⁴

15
- 33847221160
- W. Shang, X. Shi, X. Zhang, C. Ma and C. Wang: Appl. Phys. A, 2007, 87A, 129-135.
- (2007) Appl. Phys. A , vol.87 A , pp. 129-135
- Shang, W.¹ Shi, X.² Zhang, X.³ Ma, C.⁴ Wang, C.⁵

16
- 33744529890
- H. Yang, J. Ouyang, A. Tang, Y. Xiao, X. Li, X. Dong and Y. Yu: Mater. Res. Bull., 2006, 41, 1310-1318.
- (2006) Mater. Res. Bull. , vol.41 , pp. 1310-1318
- Yang, H.¹ Ouyang, J.² Tang, A.³ Xiao, Y.⁴ Li, X.⁵ Dong, X.⁶ Yu, Y.⁷

17
- 18144370423
- Y. Bessekhouad, D. Robert and J.-V. Weber: Catal. Today, 2005, 101, 315-321.
- (2005) Catal. Today , vol.101 , pp. 315-321
- Bessekhouad, Y.¹ Robert, D.² Weber, J.-V.³

18
- 0344549731
- T. Richardson: Solid State Ionics 165 (2003) 305.
- (2003) Solid State Ionics , vol.165 , pp. 305
- Richardson, T.¹

19
- 41349085164
- H. Zhang and Z. Cui: Mater. Res. Bull., 2008, 43, 1583-1589.
- (2008) Mater. Res. Bull. , vol.43 , pp. 1583-1589
- Zhang, H.¹ Cui, Z.²

20
- 10044270902
- H. Tanaka, T. Shimakawa, T. Miyata, H. Sato and T. Minami: Thin Solid Films, 2004, 469-470, 80-85.
- (2004) Thin Solid Films , vol.469-470 , pp. 80-85
- Tanaka, H.¹ Shimakawa, T.² Miyata, T.³ Sato, H.⁴ Minami, T.⁵

21
- 31344450479
- M. Goto, A. Kasahara and M. Tosa: Appl. Surf. Sci., 2006, 252, 2482-2487.
- (2006) Appl. Surf. Sci. , vol.252 , pp. 2482-2487
- Goto, M.¹ Kasahara, A.² Tosa, M.³

22
- 33751229932
- G. Papadimitropoulos, N. Vourdas, V. Vamvakas and D. Davazoglou: Thin Solid Films, 2006, 515, 2428-2432.
- (2006) Thin Solid Films , vol.515 , pp. 2428-2432
- Papadimitropoulos, G.¹ Vourdas, N.² Vamvakas, V.³ Davazoglou, D.⁴

23
- 0345733484
- T. Maruyama: Solar Energy Mater. Solar Cells, 1998, 56, 85-92.
- (1998) Solar Energy Mater. Solar Cells , vol.56 , pp. 85-92
- Maruyama, T.¹

24
- 0018495504
- V. F. Drobny and D. L. Pulfrey: Thin Solid Films, 1979, 61, 89-98.
- (1979) Thin Solid Films , vol.61 , pp. 89-98
- Drobny, V.F.¹ Pulfrey, D.L.²

25
- 55049087461
- W.-Y. Yang, W. G. Kim and S. W. Rhee: Thin Solid Films, 2008, 517, 967-971.
- (2008) Thin Solid Films , vol.517 , pp. 967-971
- Yang, W.-Y.¹ Kim, W.G.² Rhee, S.W.³

26
- 65149087768
- H.-C. Lu, J.-L. Lu, C.-Y. Lai and G.-M. Wu: Thin Solid Films, 2009, 517, 4408-4412.
- (2009) Thin Solid Films , vol.517 , pp. 4408-4412
- Lu, H.-C.¹ Lu, J.-L.² Lai, C.-Y.³ Wu, G.-M.⁴

27
- 43949131407
- J. H. Hsieh, P. W. Kuo, K. C. Peng, S. J. Liu, J. D. Hsueh and S. C. Chang: Thin Solid Films, 2008, 516, 5449-5453.
- (2008) Thin Solid Films , vol.516 , pp. 5449-5453
- Hsieh, J.H.¹ Kuo, P.W.² Peng, K.C.³ Liu, S.J.⁴ Hsueh, J.D.⁵ Chang, S.C.⁶

28
- 22544485395
- E. M. Alkoy and P. J. Kelly: Vacuum, 2005, 79, 221-230.
- (2005) Vacuum. , vol.79 , pp. 221-230
- Alkoy, E.M.¹ Kelly, P.J.²

29
- 77954280108
- D. S. C. Halin, I. A. Talib, M. A. A. Hamid and A. R. Daud: Solid State Sci. Technol., 2008, 16, (1), 232-237.
- (2008) Solid State Sci. Technol. , vol.16 , Issue.1 , pp. 232-237
- Halin, D.S.C.¹ Talib, I.A.² Hamid, M.A.A.³ Daud, A.R.⁴

30
- 33847652142
- A. S. Reddy, S. Uthanna and P. S. Reddy: Appl. Surf. Sci., 2007, 253, 5287-5292.
- (2007) Appl. Surf. Sci. , vol.253 , pp. 5287-5292
- Reddy, A.S.¹ Uthanna, S.² Reddy, P.S.³

31
- 0033704737
- S. Ghosh, A. Gupta, P. Ayyub, N. Kumar, S. A. Khan, D. Banerjee, R. Bhattacharya and W. Assmann: Vacuum. 2000, 57, 377-385.
- (2000) Vacuum. , vol.57 , pp. 377-385
- Ghosh, S.¹ Gupta, A.² Ayyub, P.³ Kumar, N.⁴ Khan, S.A.⁵ Banerjee, D.⁶ Bhattacharya, R.⁷ Assmann, W.⁸

32
- 70349137100
- V. Figueiredo, E. Elangovan, G. Gonçalves, N. Franco, E. Alves, S. H. K. Park, R. Martins and E. Fortunato: Phys. Stat. Solidi A, 2009, 206A, (9), 2143-2148.
- (2009) Phys. Stat. Solidi A , vol.206 A , Issue.9 , pp. 2143-2148
- Figueiredo, V.¹ Elangovan, E.² Gonçalves, G.³ Franco, N.⁴ Alves, E.⁵ Park, S.H.K.⁶ Martins, R.⁷ Fortunato, E.⁸

33
- 56949100118
- S. Han, H. Chen, L. Kuo and C. Tsai: Thin Solid Films, 2008, 517, 1195-1199.
- (2008) Thin Solid Films , vol.517 , pp. 1195-1199
- Han, S.¹ Chen, H.² Kuo, L.³ Tsai, C.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.