Low frictional property of copper oxide thin films optimised using a combinatorial sputter coating system

Applied Surface Science

Volumn 252, Issue 7, 2006, Pages 2482-2487

  Goto, Masahiro ^a   Kasahara, Akira ^a   Tosa, Masahiro ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Coating; Combinatorial sputter coating; Copper oxide; Frictional property; Preferred crystal orientation

Indexed keywords

COATINGS; COPPER OXIDES; CRYSTAL ORIENTATION; FRICTION; SPUTTER DEPOSITION;

COATING FILMS; LOW FRICTIONAL PROPERTY; SPUTTER GAS;

THIN FILMS;

EID: 31344450479     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.03.236     Document Type: Conference Paper

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