Fabrication and characterization of an electrostatic contraction beams micromotor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 814-817

  Sarajlic, E ^a   Berenschot, E ^a   Tas, N ^a   Fujita, H ^b   Krijnen, G ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; MICROMACHINING; POLYSILICON; SHRINKAGE; SINGLE CRYSTALS; SURFACE PROPERTIES; VOLTAGE CONTROL;

BEAMS MICROMOTOR; BIDIRECTIONAL STEPPING; CONTRACTION BEAMS; ELECTROSTATIC CONTRACTION; TRENCH ISOLATION TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 33750137301     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Fujita H 1998 Microactuators and micromachines Proceedings of the IEEE 86(8) 1721-1732
2. Thielicke E and Obermeier E 2000 Microactuators and their technologies Mechatronics 10 431-455
3. Tas N, Wissink J, Sander L, Lammerink T, Elwenspoek M 1998 Modeling, design and testing of the electrostatic shuffle motor Sensors and Actuators A 70 171-178
4. de Boer M P, Luck D L, Ashurst W R, Maboudian R, Corwin A D, Walraven J A, Redmond J M 2004 High performance surface-micromachined inchworm actuator J. Microelectormech. Syst. 13 63-74
5. Sarajlic E, Berenschot E, Fujita H, Krijnen G, Elwenspoek M 2004 High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology Int. Conf. Transducers 05 (Seoul, Korea) 53-56
6. Sarajlic E, Berenschot E, Krijnen G, Elwenspoek 2003 A low volume electrostatic inchworm microactuator with high-resolution and large force 17th European Conf. Eurosensors 03 (Guimaraes, Portugal) 194-195
7. Yeh R, Hollar S, Pister K S J 2002 Single mask, large force, and large displacement electrostatic linear inchworm motors J. Microelectormech. Syst. 11(4) 330-336
8. Luck D L, de Boer M P, Ashurst W R, Baker M S 2003 Int. Conf. Transducers 03 (Boston, USA) 404-407