Electrostatic rotary stepper micromotor for skew angle compensation in hard disk drive

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 1079-1082

  Sarajlic, E ^a   Yamahata, C ^a   Cordero, M ^a   Fujita, H ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BULK-MICROMACHINED; DATA TRACKS; EXPERIMENTAL CHARACTERIZATION; FRICTIONAL CONTACT; HARD DISK DRIVE; HARD DISK DRIVES; MAXIMUM SPEED; MICROMOTOR; MONOCRYSTALLINE SILICON WAFERS; RADIAL POSITION; SKEW ANGLES; STEPPING MOTION; VOICE COIL;

DRIVES; ELECTROSTATICS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

HARD DISK STORAGE;

EID: 65949124476     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805574     Document Type: Conference Paper

References (8)

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