A novel micro optical system employing inclined polymer mirrors and Fresnel lens for monolithic integration of optical disk pickup heads

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 599-602

  Tseng, Fan Gang ^a   Hu, Heng Tsang ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Costs; Integrated optics; Lenses; Mirrors; Monolithic integrated circuits; Optical device fabrication; Optical devices; Optical polymers; Testing; Vertical cavity surface emitting lasers

Indexed keywords

ACTUATORS; COSTS; FABRICATION; INTEGRATED OPTICS; LASER MIRRORS; MICROSYSTEMS; MIRRORS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL DATA PROCESSING; OPTICAL DEVICES; OPTICAL INSTRUMENT LENSES; OPTICAL SYSTEMS; OPTICAL TESTING; PICKUPS; POLYMERS; SOLID-STATE SENSORS; SURFACE EMITTING LASERS; TESTING; TRANSDUCERS;

DEVICE FABRICATIONS; INTEGRATION APPROACH; LOW COST FABRICATION; MICROOPTICAL SYSTEMS; MONOLITHIC INTEGRATION; OPTICAL DEVICE FABRICATION; OPTICAL PICKUP HEADS; OPTICAL POLYMERS;

LENSES;

EID: 33745085086     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215544     Document Type: Conference Paper

References (12)

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