X-ray lithography mask fabricated by excimer laser process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5641, Issue , 2004, Pages 316-322

  Li, Yigui ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Excimer laser; LIGA mask; Mask projection

Indexed keywords

BIOSENSORS; ELECTROFORMING; ELECTROPLATING; EXCIMER LASERS; LASER ABLATION; MICROMACHINING; MICROOPTICS; POLYMETHYL METHACRYLATES;

COMMERCIAL PRODUCTS; LASER PROCESS; MASK TECHNOLOGY; MICRO MOLDS;

X RAY LITHOGRAPHY;

EID: 20144362463     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.566583     Document Type: Conference Paper

References (6)

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