Surface slope metrology on deformable soft X-ray mirrors

AIP Conference Proceedings

Volumn 1234, Issue , 2010, Pages 789-792

  Yuan, Sheng ^a   Yashchuk, Valeriy V ^a   Goldberg, Kenneth A ^a   Celestre, Rich ^a   Church, Matthew ^a   McKinney, Wayne R ^a   Morrison, Greg ^a   Warwick, Tony ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

at wavelength; bender; in situ testing; KB mirror; surface slope; wavefront measurement; x ray

Indexed keywords

EID: 77955018437     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3463330     Document Type: Conference Paper

References (10)

1. P. Kirkpatrick and A. V. Baez, Formation of Optical Images by X-Rays, J. Opt. Soc. Am. 38 (9), 766-74 (1948).
2. I. Ghozeil, Hartmann and other screen tests, in Optical Shop Testing, D. Malacara, ed. Wiley, New York, 1978, pp. 323-49.
3. P. P. Naulleau, K. A. Goldberg and J. Bokor, Extreme ultraviolet carrier-frequency shearing Interferometry of a lithographic four-mirror optical system, J. of Vac. Sci. and Technol. B 18 (6), 2939-43 (2000).
4. ZYGO Corporation, http://zygo.com/.
5. Sheng Yuan, Valeriy V. Yashchuk, Kenneth Goldberg, Richard S. Celestre, Matthew N. Church, Gregory Y. Morrison, Wayne R. McKinney, Tony Warwick, Thermal Effects on Kirkpatrick-Baez (KB) Systems of Bendable Mirrors, ALS Beamline Note, LSBL-961 (June 23rd, 2009).
6. F. Siewert, V. V. Yashchuk, J. L. Kirschman, G. Y. Morrison, B. V. Smith, Initial Alignment and Commissioning of an Autocollimator Based Slope Measuring Profiler at the Advanced Light Source, LSBL Note LSBL-936 (January 9, 2009).
7. V. V. Yashchuk, DLTP Performance Test with a 1280-m Spherical Reference Mirror, LSBL Note LSBL-931 (January 12, 2009).
8. W. R. McKinney, S. C. Irick, J. L. Kirschman, A. A. MacDowell, T. Warwick, V. V. Yashchuk, New Procedure for the Adjustment of Elliptically Bent Mirrors with the Long Trace profiler, Proc. of SPIE 6704, 67040G (2007).
9. W. R. McKinney, J. L. Kirschman, A. A. MacDowell, T. Warwick, V. V. Yashchuk, Optimal tuning and calibration of bendable mirrors with slope-measuring profiler , Opt. Eng. 48 (8), 083601-8 (2009).
10. M. R. Howells, D. Cambie, R. M. Duarte, S. Irick, A. A. MacDowell, H. A. Padmore, T. R. Renner, S. Rah, R. Sandler, Theory and practice of elliptically bend x-ray mirrors, Opt. Eng. 39 (10), 2748-62 (2000).