Fabrication of PPF electrodes by a rapid thermal process

Journal of the Electrochemical Society

Volumn 158, Issue 1, 2011, Pages

  Del Campo, F Javier ^a   Godignon, Philippe ^a   Aldous, Leigh ^b   Pausas, Esther ^a   Sarrión, Mónica ^a   Zabala, Miguel ^a   Prehn, Ricard ^a   Compton, Richard G ^b  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL BEHAVIORS; ELECTROCHEMICAL RESPONSE; INERT ATMOSPHERES; PYROLYZED PHOTORESIST FILMS; RAPID THERMAL PROCESS;

ELECTROCHEMISTRY; FABRICATION; GLASSY CARBON; PHENOLS; PHOTORESISTS; PYROLYSIS; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

RAPID THERMAL PROCESSING;

EID: 79951964778     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3515169     Document Type: Article

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