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Volumn 2, Issue 9, 1999, Pages 465-467

Electrochemical analysis of carbon interdigitated microelectrodes

Author keywords

[No Author keywords available]

Indexed keywords

PHOTOLITHOGRAPHY; PHOTORESISTS; PYROLYSIS; REDOX REACTIONS; SILICON WAFERS;

EID: 0032627458     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1390872     Document Type: Article
Times cited : (32)

References (14)
  • 12
    • 0344987463 scopus 로고
    • L. Thompson, C. Willson, and M. Bowden, Editors, American Chemical Society, Washington, DC
    • Introduction to Microlithography, L. Thompson, C. Willson, and M. Bowden, Editors, p. 21, American Chemical Society, Washington, DC (1994).
    • (1994) Introduction to Microlithography , pp. 21


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.