Exploration of variables in the fabrication of pyrolysed photoresist

Journal of Solid State Electrochemistry

Volumn 12, Issue 10, 2008, Pages 1357-1365

  Fairman, Callie ^a   Yu, Samuel S C ^b   Liu, Guozhen ^a   Downard, Alison J ^b   Hibbert, D Brynn ^a   Gooding, J Justin ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

Carbon electrodes; Experimental design; Plackett Burman design; Pyrolysed photoresist films

Indexed keywords

(1 1 0) SURFACE; (I ,J) CONDITIONS; ELECTRODE CHARACTERISTICS; ELECTRODE MATERIALS; ELECTRON TRANSFER (ET); EXPERIMENTAL DESIGN (ED); FABRICATION PARAMETERS; FURNACE TUBES; GAS FLOWING; PHOTORESIST FILMS; PYROLYSIS PROCESSING; REDOX SPECIES; SPRINGER (CO); SURFACE CLEANLINESS; SURFACE OXIDES;

ARCHITECTURAL DESIGN; CHEMICAL REACTIONS; ELECTROCHEMICAL ELECTRODES; ELECTROLYSIS; FURNACES; HEALTH; LEAD; METALLIZING; PETROLEUM ENGINEERING; PHOTOACOUSTIC EFFECT; PHOTORESISTORS; PHOTORESISTS; PYROLYSIS; SURFACE PROPERTIES; SURFACE ROUGHNESS; SURFACE TREATMENT; THERMOGRAVIMETRIC ANALYSIS; VARIATIONAL TECHNIQUES;

SURFACES;

EID: 46149084629     PISSN: 14328488     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10008-008-0577-4     Document Type: Article

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