CMOS-integrated stress sensor systems

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 2073-2078

  Ruther, P ^a   Baumann, M ^a   Gieschke, P ^a   Herrmann, M ^a   Lemke, B ^a   Seidl, K ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS PROCESSS; CURRENT COMPONENT; HIGHLY INTEGRATED; MECHANICAL STRESS; NEURAL PROBES; ORTHODONTIC BRACKETS; OUT-OF-PLANE; PIEZO-RESISTIVE; PIEZO-RESISTORS; POST-CMOS; SENSING ELEMENTS; SENSOR ELEMENTS; SENSOR SYSTEMS; SIGNAL AMPLIFICATIONS; STRESS SENSING; STRESS SENSOR; SYSTEM ARCHITECTURES; WHEATSTONE BRIDGES;

BRIDGE CIRCUITS; FIELD EFFECT TRANSISTORS; SIGNAL PROCESSING; STRESS MEASUREMENT;

SENSORS;

EID: 79951879356     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690329     Document Type: Conference Paper

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