Smart brush based on a high density CMOS stress sensor array and SU-8 microposts

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 631-634

  Gieschke, P ^a   Held, J ^a   Doelle, M ^a   Bartholomeyczik, J ^a   Ruther, P ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; CMOS INTEGRATED CIRCUITS; MEMS; SIGNAL PROCESSING; STRESS MEASUREMENT; SYSTEM BUSES;

A/D CONVERSION; HORIZONTAL FORCES; INTEGRATED STRESS; ON-CHIP CIRCUITRY; SENSOR SELECTION; SERIAL BUS COMMUNICATION; SIGNAL AMPLIFICATIONS; STRESS SENSOR ARRAYS;

FIELD EFFECT TRANSISTORS;

EID: 34748814115     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433163     Document Type: Conference Paper

References (8)

1. M. Doelle, Field Effect Transistor Based CMOS Stress Sensors, PhD thesis, IMTEK, University of Freiburg, Germany, 2006.
2. M. Doelle, C. Peters, P. Ruther, and O. Paul, J. Microelectromech. Syst., vol. 15, no. 1, pp. 120-130, 2006.
3. H. Takao, K. Sawada, and M. Ishida, in Tech. Digest IEEE MEMS 2004 Conf., Maastricht, The Netherlands, pp. 846-849, 2004.
4. J. Tan, J. Tien, D. Pirone, D. Gray, K. Bhadriaju, C. Chen, Proc. Natl. Acad. Sci. USA, vol. 100, no. 4, pp. 1484-1489, 2003.
5. J.Engel, J.Chen, C.Liu, D. Bullen, J. Microelectromech. Syst., vol. 15, no. 4, pp. 729-736, 2006.
6. J. Bartholomeyczik, Advanced CMOS-Based Stress Sensing, PhD thesis, IMTEK, University of Freiburg, Germany, 2006.
7. M. Doelle, P. Rüther, and O. Paul, Proc. IEEE MEMS 2003 Conf, pp. 490-493, 2003.
8. I. Behrens, L. Doering, E. Peiner, J. Micromech. Microeng., vol. 13, pp. 171-177, 2003.