Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors

Sensors and Actuators, A: Physical

Volumn 165, Issue 1, 2011, Pages 16-25

  Mai, Trong Thi ^a   Hsiao, Fu Li ^a,b   Lee, Chengkuo ^a   Xiang, Wenfeng ^a   Chen, Chii Chang ^c   Choi, W K ^a,d  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

^c NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^d SINGAPORE MIT ALLIANCE   (Singapore)

Author keywords

MEMS; Microcantilever; Nano ring; Nanomechanical sensor; NEMS; Photonic crystal resonator

Indexed keywords

BAND-GAP STRUCTURES; BIO-CHEMICAL SENSOR; FORCE LOAD; FORCE SENSOR; FUNDAMENTAL DESIGN; LINEAR FUNCTIONS; LINEAR RELATIONSHIPS; MICRO CANTILEVER SENSORS; MICRO-CANTILEVERS; MICROCANTILEVER; NANO ELECTROMECHANICAL SYSTEMS; NANO-METER SCALE; NANOMECHANICAL SENSING; NANOMECHANICAL SENSORS; RESONANT WAVELENGTHS; RING RESONATOR; SENSING ELEMENTS; SENSING MECHANISM; STRAIN SENSORS; STRONG DEMAND; WAVELENGTH SHIFT;

COMPOSITE MICROMECHANICS; CRYSTAL RESONATORS; CRYSTAL STRUCTURE; MICROWAVE DEVICES; MODULATORS; NANORINGS; OPTICAL RESONATORS; PHOTONIC CRYSTALS;

NANOSENSORS;

EID: 79951774828     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.01.006     Document Type: Conference Paper

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