A large-area high-reflectivity broadband monolithic single-crystal-silicon photonic crystal mirror MEMS scanner with low dependence on incident angle and polarization

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 15, Issue 5, 2009, Pages 1447-1454

  Jung, Il Woong ^a   Mallick, Shrestha Basu ^b   Solgaard, Olav ^a  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

Broadband reflectivity; Combdrives; Generation of photonic elements by reactive ion etching (GOPHER); Microelectromechanical systems (MEMS); Micromirror; Microoptoelectromechanical systems (MOEMS); Monolithic; Photonic crystal (PC) mirror; Scanner

Indexed keywords

BROADBAND REFLECTIVITY; COMBDRIVES; GENERATION OF PHOTONIC ELEMENTS BY REACTIVE ION ETCHING (GOPHER); MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMIRROR; MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS); MONOLITHIC; SCANNER;

COMPOSITE MICROMECHANICS; FABRICATION; INTERNET PROTOCOLS; LIGHT MEASUREMENT; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OXIDE FILMS; PHOTONIC CRYSTALS; POLARIZATION; POLYSILICON; PROCESSING; REACTIVE ION ETCHING; REFLECTION; RESONANCE; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

SCANNING;

EID: 70350200898     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2009.2021863     Document Type: Conference Paper

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