Integrated micro ring resonator displacement sensor for scanning probe microscopies

Journal of Micromechanics and Microengineering

Volumn 14, Issue 3, 2004, Pages 374-381

  Kiyat, Isa ^a   Kocabas, Coskun ^a   Aydinli, Atilla ^a  

^a BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO RING RESONATORS; SCANNING PROBE MICROSCOPIES;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTERFEROMETRY; OPTICAL RESONATORS; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SENSITIVITY ANALYSIS; TIME DOMAIN ANALYSIS; ULTRAHIGH VACUUM;

SENSORS;

EID: 1642619081     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/3/009     Document Type: Article

References (28)

1. Binning G, Quate C and Gerber Ch 1986 Atomic force microscope Phys. Rev. Lett. 56 930-3
2. Meyer G and Amer N M 1988 Novel optical approach to atomic force microscopy Appl. Phys. Lett. 53 1045-7
3. Rugar D, Mamin H J and Guethner P 1989 Improved fiber-optic interferometer for atomic force microscopy Appl. Phys. Lett. 55 2588-90
4. Tortonese M, Yamada H, Barrett R C and Quate C F 1991 Atomic force microscopy using a piezoresistive cantilever 1991 Proc. IEEE Conf. on Tranducers (1991) 448-51
5. Akamine S, Albrecht T R, Zdeblick M J and Quate C F 1989 Microfabricated scanning tunneling microscope IEEE Electron Device Lett. 10 490-92
6. Manalis S R, Minne S C, Atalar A and Quate C F 1996 Interdigital cantilever for atomic force microscopy Appl. Phys. Lett. 69 3944-6
7. Wagner C, Frankenberger J and Daimel P P 1993 Optical pressure sensor based on Mach-Zehnder interferometer integrated with a lateral a-Si:H p-i-n photodiode IEEE Electron Device Lett. 10 1257-9
8. Luff B J, Harris R D, Wilkinson J S, Wilson R and Schiffirin D J 1996 Integrated-optical directional coupler biosensor Opt. Lett. 21 618-20
9. De Brabander G N, Boyd J T and Beheim G 1994 Integrated optical ring resonator with micromechanical diaphragm for pressure sensing IEEE Photon. Technol. Lett. 6 671-3
10. Aydinli A and Kocabas C PCT application with application no PCT/TR03/053 (filed on 18 June 2003) Integrated Optical Sensors for Scaning Probe Microscopies
11. Okamoto K 2000 Fundamentals of Optical Waveguide (New York: Academic) p 265
12. Kohtoku M, Oku S, Kadota Y, Shibata Y and Yoshikuni Y 2000 200-GHz FSR periodic multi-demultiplexer with flattened transmission and rejection band by using a Mach-Zehnder interferometer with a ring resonator IEEE Photon. Technol. Lett. 12 1174-6
13. 2 microring resonator optical channel dropping filters IEEE Photon. Technol. Lett. 10 549-51
14. Little B E, Haus H A, Foresi J S, Kimerling L C, Ippen E P and Ripin D J 1998 Wavelength switching and routing using absorption and resonance IEEE Photon. Technol. Lett. 10 816-918
15. Choi J M, Lee R K and Yariv A 2001 Control of critical coupling in a ring resonator-fiber configuration: application to wavelength-selective switching, modulation, amplification, and oscillation Opt. Lett. 26 1236-8
16. Altman J L 1964 Microwave Circuits (Princeton, NJ: Van-Nostrand)
17. Chin M K and Ho S T 1998 Design and modeling of waveguide-coupled single-mode microring resonators J. Lightwave Technol. 16 1433-46
18. Kim S and Gopinath A 1998 Vector analysis of optical dielectric waveguide bends using finite-difference method J. Lightwave Technol. 14 2085-92
19. Pennings E C M, Deri R J and Hawkins R J 1991 Simple method for estimating usable bend radii of deeply etched optical rib waveguides Electron. Lett. 27 1532-4
20. Brook A J, Bending S J, Pinto J, Oral A, Ritchie D, Beere H, Springthorpe A and Henini M 2003 Micromachined III-V cantilevers for AFM-tracking scanning hall probe microscopy J. Micromech. Microeng. 13 124-8
21. Brook A J, Bending S J, Pinto J, Oral A, Ritchie D, Beere H, Henini M and Springthorpe A 2003 Integrated piezoresistive sensors for atomic force-guided scanning Hall probe microscopy Appl. Phys. Lett. 82 3538-40
22. Beck R G, Eriksson M A, Topinka M A, Westervelt R M, Maranowski K D and Gossard A C 1998 GaAs/AlGaAs self-sensing cantilevers for low temperature scanning probe microscopy Appl. Phys. Lett. 73 1149-51
23. Tortonese M 1997 Cantilevers and tips for atomic force microscopy IEEE Eng. Med. Biol. 16 28-33
24. Little B E, Chu S T, Pan W, Ripin D, Kaneko T, Kokubun Y and Ippen E 1993 Vertically coupled glass microring resonator channel draping filters IEEE Photon. Technol. Lett. 11 215-7
25. Hansen O and Boisen A 1999 Noise in piezoresistive atomic force microscopy Nanotechnology 10 51-60
26. ILX Lightwave Corp. 79800D DFB Source Module
27. ILX Lightwave Corp. Tunable laser Source TLS 8800 Series
28. Rast S, Wattinger C, Gysin U and Meyer E 2000 The noise of cantilever Nanotechnology 11 169-72