Nanophotonics sensor based on microcantilever for chemical analysis

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 15, Issue 5, 2009, Pages 1323-1326

  Xiang, Wenfeng ^a   Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

MEMS; Microcantilever; Nanomechanical sensor; NEMS; Photonic crystal resonator

Indexed keywords

CANTILEVER BENDING; CANTILEVER DEFLECTION; CANTILEVER SENSORS; CHEMICAL SENSING; DETECTION CAPABILITY; MICRO-CANTILEVERS; MICROCANTILEVER; MICROMECHANICAL SENSORS; NANOMECHANICAL SENSOR; NUMERICAL SIMULATION; OPTICAL READOUT; RESONANT WAVELENGTHS; SI-BASED;

BENDING (DEFORMATION); CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; CRYSTAL RESONATORS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; NANOPHOTONICS; NUCLEIC ACIDS; PHOTONIC CRYSTALS;

ATOMIC FORCE MICROSCOPY;

EID: 70350153443     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2009.2016578     Document Type: Conference Paper

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