Design and modeling of a nanomechanical sensor using silicon photonic crystals

Journal of Lightwave Technology

Volumn 26, Issue 7, 2008, Pages 839-846

  Lee, Chengkuo ^a,b   Radhakrishnan, Rohit ^a   Chen, Chii Chang ^c   Li, Jing ^b   Thillaigovindan, Jayaraj ^a   Balasubramanian, N ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Microelectromechanical systems (MEMS); Nano electromechanical systems (NEMS); Nano mechanical sensor; Nano photonics; Photonic Crystals (PhCs)

Indexed keywords

DEFORMATION; ENERGY GAP; LIGHT PROPAGATION; MEMS; MICROCAVITIES; OPTICAL WAVEGUIDES; PHOTONIC CRYSTALS; SILICON;

NANO PHOTONICS; SILICON BRIDGE STRUCTURE; SILICON PHOTONIC CRYSTALS;

NANOMECHANICS;

EID: 42649136922     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2007.915273     Document Type: Article

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