Microcantilever sensor using photonic crystal nanocavity resonator

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 959-962

  Xiang, Wenfeng ^a   Hsiao, Fu Li ^a   Lee, Chengkuo ^a,b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Nanomechanical sensors; NEMS; Photonic crystal

Indexed keywords

CANTILEVER BENDING; DETECTION LIMITS; MICRO CANTILEVER SENSORS; NANO-CAVITIES; NANO-MECHANICAL CANTILEVER; NANOMECHANICAL SENSORS; PC WAVEGUIDES; PHOTONIC CRYSTAL NANOCAVITY; U-SHAPED;

ACTUATORS; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; MICROSYSTEMS; NANOCANTILEVERS; PHOTONIC CRYSTALS; PIEZOELECTRIC TRANSDUCERS; RESONATORS;

SOLID-STATE SENSORS;

EID: 71449083559     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285976     Document Type: Conference Paper

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