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Volumn 253, Issue 1 SPEC. ISS., 2006, Pages 328-334

Investigation of thermal annealing effects on microstructural and optical properties of HfO 2 thin films

(10) Modreanu, M a Sancho Parramon, J a Durand, O b Servet, B b Stchakovsky, M c Eypert, C c Naudin, C d Knowles, A e Bridou, F f Ravet, M F f

a UNIVERSITY COLLEGE CORK (Ireland)

b THALES RESEARCH AND TECHNOLOGY (France)

c Jobin Yvon (France)

d HORIBA LTD (Japan)

e Horiba Jobin Yvon Ltd (United Kingdom)

f CNRS (France)

Author keywords

HfO 2; Optical properties; Plasma ion assisted deposition; Solid phase crystallization

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CRYSTALLIZATION; DEPOSITION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HAFNIUM COMPOUNDS; MICROSTRUCTURE; OPTICAL PROPERTIES; PHASE TRANSITIONS; RAMAN SPECTROSCOPY; ULTRAVIOLET SPECTROSCOPY; X RAY DIFFRACTION;

OPTICAL BANDGAP; PLASMA ION ASSISTED DEPOSITION (PIAD); SOLID PHASE CRYSTALLIZATION; X-RAY REFLECTOMETRY (XRR);

THIN FILMS;

EID: 33750581513 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2006.06.005 Document Type: Article

Times cited : (119)

References (29)

1
- 0036603444
- Torchio P., Gatto A., Alvisi M., Albrand G., Kaiser N., and Amra C. Appl. Opt. 41 (2002) 3256-3266
- (2002) Appl. Opt. , vol.41 , pp. 3256-3266
- Torchio, P.¹ Gatto, A.² Alvisi, M.³ Albrand, G.⁴ Kaiser, N.⁵ Amra, C.⁶

2
- 33750603070
- Capone S., Leo G., Rella R., Siciliano P., Vasanelli L., Alvisi M., Mirenghi L., and Rizo A. J. Vac. Sci. Technol. A16 (1998) 3654
- (1998) J. Vac. Sci. Technol. , vol.A16 , pp. 3654
- Capone, S.¹ Leo, G.² Rella, R.³ Siciliano, P.⁴ Vasanelli, L.⁵ Alvisi, M.⁶ Mirenghi, L.⁷ Rizo, A.⁸

3
- 0542367665
- Platt C.L., Dieny B., and Berkowitz A.E. Appl. Phys. Lett. 69 (1996) 2291
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2291
- Platt, C.L.¹ Dieny, B.² Berkowitz, A.E.³

4
- 79956051787
- Afanas'ev V.V., Stesmans A., Chen F., Shi X., and Campbell S.A. Appl. Phys. Lett. 81 (2002) 1053
- (2002) Appl. Phys. Lett. , vol.81 , pp. 1053
- Afanas'ev, V.V.¹ Stesmans, A.² Chen, F.³ Shi, X.⁴ Campbell, S.A.⁵

5
- 0026202438
- Lehan J.P., Mao Y., Bovard B.G., and Macleod H.A. Thin Solids Films 203 (1991) 227-250
- (1991) Thin Solids Films , vol.203 , pp. 227-250
- Lehan, J.P.¹ Mao, Y.² Bovard, B.G.³ Macleod, H.A.⁴

6
- 0035881403
- Neumayer D.A., and Cartier E. J. Appl. Phys. 90 (2001) 1801-1808
- (2001) J. Appl. Phys. , vol.90 , pp. 1801-1808
- Neumayer, D.A.¹ Cartier, E.²

7
- 0038347318
- Mori T., Fujiwara M., Manory R.R., Shimizu I., Tanaka T., and Miyake S. Surf. Coat. Technol. 169-170 (2003) 528
- (2003) Surf. Coat. Technol. , vol.169-170 , pp. 528
- Mori, T.¹ Fujiwara, M.² Manory, R.R.³ Shimizu, I.⁴ Tanaka, T.⁵ Miyake, S.⁶

8
- 0037109163
- Aarik J., Sundqvist J., Aidla A., Lu J., Sajavaara T., Kukli K., and Harsta A. Thin Solid Films 418 (2002) 69
- (2002) Thin Solid Films , vol.418 , pp. 69
- Aarik, J.¹ Sundqvist, J.² Aidla, A.³ Lu, J.⁴ Sajavaara, T.⁵ Kukli, K.⁶ Harsta, A.⁷

9
- 0032653080
- Aarik J., Aidla A., Kiisler A., Uustare T., and Sammelselg V. Thin Solid Films 340 (1999) 110-116
- (1999) Thin Solid Films , vol.340 , pp. 110-116
- Aarik, J.¹ Aidla, A.² Kiisler, A.³ Uustare, T.⁴ Sammelselg, V.⁵

10
- 2342598390
- Scarel G., Spiga S., Wimer C., Tallarida G., Ferrari S., and Fanciulli M. Mater. Sci. Eng. B 109 (2004) 11
- (2004) Mater. Sci. Eng. B , vol.109 , pp. 11
- Scarel, G.¹ Spiga, S.² Wimer, C.³ Tallarida, G.⁴ Ferrari, S.⁵ Fanciulli, M.⁶

11
- 0042231963
- Modreanu M., Hurley P.K., O'Sullivan B.J., O'Looney B., Sénateur J.P., Rousell H., Rousell F., Audier M., Dubourdieu C., Boyd I.W., Fang Q., Leedham T.L., Rushworth S., Jones A.C., Davies H., and Jimenez C. Proc. SPIE Int. Soc. Opt. Eng. 4876 2 (2002) 1236-1246
- (2002) Proc. SPIE Int. Soc. Opt. Eng. , vol.4876 , Issue.2 , pp. 1236-1246
- Modreanu, M.¹ Hurley, P.K.² O'Sullivan, B.J.³ O'Looney, B.⁴ Sénateur, J.P.⁵ Rousell, H.⁶ Rousell, F.⁷ Audier, M.⁸ Dubourdieu, C.⁹ Boyd, I.W.¹⁰ Fang, Q.¹¹ Leedham, T.L.¹² Rushworth, S.¹³ Jones, A.C.¹⁴ Davies, H.¹⁵ Jimenez, C.¹⁶

12
- 18244426116
- Schaeffer J., Edwards N.V., Liu R., Roan D., Hradsky B., Gregory R., Kulik J., Duda E., Contreras L., Christiansen J., Zollner S., Tobin P., Nguyen B.Y., Nieh R., Ramon M., Rao R., Hegde R., Rai R., Baker J., and Voight S. J. Electrochem. Soc. 150 (2003) F67-F74
- (2003) J. Electrochem. Soc. , vol.150
- Schaeffer, J.¹ Edwards, N.V.² Liu, R.³ Roan, D.⁴ Hradsky, B.⁵ Gregory, R.⁶ Kulik, J.⁷ Duda, E.⁸ Contreras, L.⁹ Christiansen, J.¹⁰ Zollner, S.¹¹ Tobin, P.¹² Nguyen, B.Y.¹³ Nieh, R.¹⁴ Ramon, M.¹⁵ Rao, R.¹⁶ Hegde, R.¹⁷ Rai, R.¹⁸ Baker, J.¹⁹ Voight, S.²⁰ more..

13
- 0036567768
- Boher P., Evrard P., Piel J.P., and Stehle J.L. J. Non-Cryst. Solids 303 (2002) 167
- (2002) J. Non-Cryst. Solids , vol.303 , pp. 167
- Boher, P.¹ Evrard, P.² Piel, J.P.³ Stehle, J.L.⁴

14
- 1142291777
- Ferrari S., Modreanu M., Scarel G., and Fanciulli M. Thin Solid Films 450 (2004) 124-127
- (2004) Thin Solid Films , vol.450 , pp. 124-127
- Ferrari, S.¹ Modreanu, M.² Scarel, G.³ Fanciulli, M.⁴

15
- 15344348190
- Modreanu M., Sancho-Parramon J., O'Connell D., Justice J., Durand O., and Servet B. Mater. Sci. Eng. B 118 (2005) 127
- (2005) Mater. Sci. Eng. B , vol.118 , pp. 127
- Modreanu, M.¹ Sancho-Parramon, J.² O'Connell, D.³ Justice, J.⁴ Durand, O.⁵ Servet, B.⁶

16
- 1142303868
- Durand O. Thin Solid Films 450 (2004) 51
- (2004) Thin Solid Films , vol.450 , pp. 51
- Durand, O.¹

17
- 0028494671
- Bridou F., and Pardo B. J. X-ray Sci. Technol. 4 (1994) 200
- (1994) J. X-ray Sci. Technol. , vol.4 , pp. 200
- Bridou, F.¹ Pardo, B.²

18
- 33847596250
- Aspnes D.E., and Stunda A.A. Phys. Rev. B 27 (1983) 985
- (1983) Phys. Rev. B , vol.27 , pp. 985
- Aspnes, D.E.¹ Stunda, A.A.²

19
- 0034782493
- Zhao C., Roebben G., Heyns M., and Van Der Biest O. Key Eng. Mater. 206-213 (2002) 1285
- (2002) Key Eng. Mater. , vol.206-213 , pp. 1285
- Zhao, C.¹ Roebben, G.² Heyns, M.³ Van Der Biest, O.⁴

20
- 0035507333
- van Dover R.B., Lang D.V., Green M.L., and Manchanda L. J. Vac. Sci. Technol. A 19 (2001) 2779
- (2001) J. Vac. Sci. Technol. A , vol.19 , pp. 2779
- van Dover, R.B.¹ Lang, D.V.² Green, M.L.³ Manchanda, L.⁴

21
- 0037096520
- 233106
- Zhao X., and Vaderbilt D. Phys. Rev. B 65 (2002) 233106
- (2002) Phys. Rev. B , vol.65
- Zhao, X.¹ Vaderbilt, D.²

22
- 37649026786
- 184301
- Rignanese G.M., Gonze X., Jun G., Cho K., and Pasquarello A. Phys. Rev. B 69 (2004) 184301
- (2004) Phys. Rev. B , vol.69
- Rignanese, G.M.¹ Gonze, X.² Jun, G.³ Cho, K.⁴ Pasquarello, A.⁵

23
- 0001319026
- Anastassakis E. J. Appl. Phys. 86 (1999) 249
- (1999) J. Appl. Phys. , vol.86 , pp. 249
- Anastassakis, E.¹

24
- 0031248563
- Kim B.K., and Hamaguchi H. Mater. Res. Bull. 32 (1997) 1367
- (1997) Mater. Res. Bull. , vol.32 , pp. 1367
- Kim, B.K.¹ Hamaguchi, H.²

25
- 0037042017
- Robertson J. Appl. Surf. Sci. 190 (2002) 2
- (2002) Appl. Surf. Sci. , vol.190 , pp. 2
- Robertson, J.¹

26
- 0000214962
- Balog M., Schieber M., Michman M., and Patai S. Thin Solid Films 41 (1977) 247
- (1977) Thin Solid Films , vol.41 , pp. 247
- Balog, M.¹ Schieber, M.² Michman, M.³ Patai, S.⁴

27
- 15344349102
- Seiler D.G., Diebold A.C., Shaffner T.J., McDonald R., Zollner S., Khosla R.P., and Secula E.M. (Eds)
- Edwards N.V. In: Seiler D.G., Diebold A.C., Shaffner T.J., McDonald R., Zollner S., Khosla R.P., and Secula E.M. (Eds). Characterization and Metrology for ULSI Technology: 2003 International Conference (2003) 723
- (2003) Characterization and Metrology for ULSI Technology: 2003 International Conference , pp. 723
- Edwards, N.V.¹

28
- 0000389489
- Bruggeman D.A.G. Ann. Phys. (Leipzig) 24 (1965) 636
- (1965) Ann. Phys. (Leipzig) , vol.24 , pp. 636
- Bruggeman, D.A.G.¹

29
- 0001524926
- Jellison G.E., and Modine F.A. Appl. Phys. Lett. 69 (1996) 371
- (1996) Appl. Phys. Lett. , vol.69 , pp. 371
- Jellison, G.E.¹ Modine, F.A.²

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