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Volumn 13, Issue 4, 2002, Pages 451-455

Mechanical properties of amorphous anodic alumina and tantala films using nanoindentation

(6) Alcala G a Skeldon, P a Thompson, G E a Mann, A B a Habazaki, H b Shimizu, K c

a UNIVERSITY OF MANCHESTER (United Kingdom)

b HOKKAIDO UNIVERSITY (Japan)

c KEIO UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; AMORPHOUS FILMS; APPROXIMATION THEORY; ELASTIC MODULI; HARDNESS; TANTALUM COMPOUNDS;

AMORPHOUS ANODIC ALUMINA FILM; AMORPHOUS TANTALA FILM; NANOINDENTATION;

NANOTECHNOLOGY;

EID: 0036689335 PISSN: 09574484 EISSN: None Source Type: Journal
DOI: 10.1088/0957-4484/13/4/302 Document Type: Article

Times cited : (101)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.