Miniature Nernstian oxygen sensor for deposition and growth environments

Review of Scientific Instruments

Volumn 73, Issue 1, 2002, Pages 156-

  Van Setten, E ^a   Gur T M ^b   Blank, D H A ^a   Bravman, J C ^c   Beasley, M R ^b  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b STANFORD UNIVERSITY   (United States)

^c Stanford University   (United States)

Author keywords

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Indexed keywords

EID: 0036147739     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1424906     Document Type: Article

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