Nanoindentation measurements of combustion CVD Al2O3 and YSZ films

Materials Science and Engineering: A

Volumn 359, Issue 1-2, 2003, Pages 112-118

  Stollberg, D W ^a   Hampikian, J M ^a   Riester, L ^b   Carter, W B ^a  

^a Georgia Institute of Technology   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Al2O3; Alumina; Combustion chemical vapor deposition; Combustion CVD; Fracture toughness; Hardness; Modulus; Nanoindentation; YSZ; Yttria stabilized zirconia

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEFORMATION; ELASTIC MODULI; FRACTURE TOUGHNESS; HARDNESS; INDENTATION; LOADS (FORCES); PLASTICITY; SURFACE ROUGHNESS; THIN FILMS; ZIRCONIA;

NANOINDENDATION;

ALUMINA;

ALUMINUM OXIDE; CHEMICAL VAPOR DEPOSITION; COMBUSTION; FRACTURE TOUGHNESS; HARDNESS; ZIRCONIUM OXIDE;

EID: 0041825331     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(03)00339-3     Document Type: Article

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