Structural and optical properties of nonpolar (1120) ZnO films grown by plasma-assisted molecular-beam epitaxy

IEEE Transactions on Plasma Science

Volumn 39, Issue 2, 2011, Pages 700-703

  Liu, Fengjuan ^a   Zhang, Rui ^b,c   Hu, Zuofu ^a   Sun, Jian ^a   Huang, Haiqin ^a   Li, Zhenjun ^a   Zhao, Jianwei ^a   Yin, Penggang ^a   Guo, Lin ^a   Zhang, Xiqing ^a   Wang, Yongsheng ^a  

^a BEIJING JIAOTONG UNIVERSITY   (China)

^b BEIHANG UNIVERSITY   (China)

^c Capital Museum   (China)

Author keywords

A plane ZnO; photoluminescence (PL); Raman; X ray diffraction (XRD)

Indexed keywords

A-PLANE; BAND GAP LUMINESCENCE; EPILAYERS GROWN; HIGH-PURITY; MULTIPHONONS; NON-POLAR; PHOTOLUMINESCENCE SPECTRUM; PLANE SAPPHIRE; PLASMA-ASSISTED MOLECULAR BEAM EPITAXY; RAMAN; RESONANT RAMAN SCATTERING; SMOOTH SURFACE; STRUCTURAL AND OPTICAL PROPERTIES; VIBRATION CHARACTERISTICS; WURTZITE STRUCTURE; WURTZITES; X-RAY DIFFRACTION (XRD); ZNO; ZNO FILMS;

DIFFRACTION; EPITAXIAL GROWTH; MOLECULAR BEAMS; PHOTOLUMINESCENCE; SEMICONDUCTOR QUANTUM WELLS; SURFACE STRUCTURE; X RAY DIFFRACTION; ZINC OXIDE; ZINC SULFIDE;

OPTICAL PROPERTIES;

EID: 79951615081     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2010.2093910     Document Type: Article

References (23)

1. A. Murai, D. B. Thompson, H. Masui, N. Fellows, U. K. Mishra, S. Nakamura, and S. P. Denbaars, "Hexagonal pyramid shaped lightemitting diodes based on ZnO and GaN direct wafer bonding," Appl. Phys. Lett., vol. 89, no. 17, pp. 171 116-1-171 116-3, Oct. 2006.
2. H. K. Yadav, K. Sreeniva, and V. Gupta, "Study of metal/ZnO based thin film ultraviolet photodetectors: The effect of induced charges on the dynamics of photoconductivity relaxation," J. Appl. Phys., vol. 107, no. 4, pp. 044 507-1-044 507-9, Feb. 2010.
3. K. Vanheusden, C. H. Seager, W. L. Warren, D. R. Tallant, and J. A. Voigt, "Correlation between photoluminescence and oxygen vacancies in ZnO phosphors," Appl. Phys. Lett., vol. 68, no. 3, pp. 403-405, Jan. 1996. (Pubitemid 126683741)
4. D. M. Bagnall, Y. F. Chen, Z. Zhu, T. Yao, S. Koyama, M. Y. Shen, and T. Goto, "Optically pumped lasing of ZnO at room temperature," Appl. Phys. Lett., vol. 70, no. 17, pp. 2230-2232, Apr. 1997. (Pubitemid 127643672)
5. N. W. Emanetoglu, C. Gorla, Y. Liu, S. Liang, and Y. Lu, "Epitaxial ZnO piezoelectric thin films for saw filters," Mater. Sci. Semicond. Process., vol. 2, no. 3, pp. 247-252, Oct. 1999. (Pubitemid 129591339)
6. T. T. Wu and W. S. Wang, "An experimental study on the ZnO/sapphire layered surface acoustic wave device," J. Appl. Phys., vol. 96, no. 9, pp. 5249-5253, Nov. 2004.
7. D. S. Liu, C. Y.Wu, C. S. Sheu, F. C. Tsai, and C. H. Li, "The preparation of piezoelectric ZnO films by RF magnetron sputtering for layered surface acoustic wave device applications," Jpn. J. Appl. Phys., vol. 45, no. 4B, pp. 3531-3536, Apr. 2006.
8. Y. F. Chen, H. J. Ko, S. K. Hong, and T. Yao, "Layer-by-layer growth of ZnO epilayer on Al2O3 (0001) by using a MgO buffer layer," Appl. Phys. Lett., vol. 76, no. 5, pp. 559-561, Jan. 2000.
9. K. K. Kim, J. H. Song, H. J. Jung, W. K. Choi, S. J. Park, J. H. Song, and J. Y. Lee, "Photoluminescence and heteroepitaxy of ZnO on sapphire substrate (0001) grown by RF magnetron sputtering," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 18, no. 6, pp. 2864-2868, Nov. 2000.
10. M. Kubo, Y. Oumi, H. Takaba, A. Chatterjee, A. Miyamoto,M. Kawasaki, M. Yoshimoto, and H. Koinuma, "Homoepitaxial growth mechanism of ZnO (0001): Molecular-dynamics simulations," Phys. Rev. B, Condens. Matter, vol. 61, no. 23, pp. 16 187-16 192, Jun. 2000.
11. S. K. Han, J. G. Kim, J. H. Kim, and S. K. Hong, "Effects of two-step growth by employing Zn-rich and O-rich growth conditions on properties of (112̄0) ZnO films grown by plasma-assisted molecular beam epitaxy on sapphire," J. Vac. Sci. Technol. B, Microelectron. Nanometer Struct., vol. 27, no. 3, pp. 1635-1640, May 2009.
12. T. Makino, A. Ohtomo, C. H. Chia, Y. Segawa, H. Koinuma, and M. Kawasaki, "Internal electric field effect on luminescence properties of ZnO/(Mg, Zn)O quantum wells," Phys. E, vol. 21, no. 2-4, pp. 671-675, Mar. 2004.
13. C. Morhain, T. Bretagnon, P. Lefebvre, X. Tang, P. Valvin, T. Guillet, B. Gil, T. Taliercio, M. Teisseire-Doninelli, B. Vinter, and C. Deparis, "Internal electric field in wurtzite ZnO/ Zn0.78Mg0.22O quantum wells," Phys. Rev. B, Condens. Matter, vol. 72, no. 24, p. 241 305, Dec. 2005.
14. G. Saraf, T. Siegrist, and Y. C. Lu, "Structural anisotropy in a- MgxZn1-xO (0≤ x≤ 0.33) films on r-sapphire," J. Vac. Sci. Technol. B, Microelectron. Nanometer Struct., vol. 27, no. 3, pp. 1620-1624, May 2009.
15. H. F. Liu, S. J. Chua, G. X. Hu, H. Gong, and N. Xiang, "Effects of substrate on the structure and orientation of ZnO thin film grown by RF-magnetron sputtering," J. Appl. Phys., vol. 102, no. 8, pp. 083 529- 1-083 529-6, Oct. 2007.
16. C. R. Gorla, N.W. Emanetoglu, S. Liang,W. E. Mayo, Y. Lu,M. Wraback, and H. Shen, "Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (011̄2) sapphire by metalorganic chemical vapor deposition," J. Appl. Phys., vol. 85, no. 5, pp. 2595-2602, Mar. 1999.
17. A. Meaney, J.-R. Duclere, E. McGlynn, J.-P. Mosnier, R. O'Haire, and M. O. Henry, "Comparison of structural, optical and electrical properties of undoped ZnO thin films grown on r- and c- Al2O3 substrates using pulsed laser deposition," Superlatt. Microstruct., vol. 38, no. 4-6, pp. 256-264, Oct.-Dec. 2005.
18. P. Vennéguès, J. M. Chauveau, M. Korytov, C. Deparis, J. Zuniga-Perez, and C.Morhain, "Interfacial structure and defect analysis of nonpolar ZnO films grown on R-plane sapphire by molecular beam epitaxy," J. Appl. Phys., vol. 103, no. 8, pp. 083 525-1-083 525-7, Apr. 2008.
19. J. F. Scott, "UV resonant raman scattering in ZnO," Phys. Rev. B, Condens. Matter, vol. 2, no. 4, pp. 1209-1211, Aug. 1970.
20. K. A. Alim, V. A. Fonoberov, and A. A. Balandin, "Origin of the optical phonon frequency shifts in ZnO quantum dots," Appl. Phys. Lett., vol. 86, no. 5, pp. 053 103-1-053 103-3, Jan. 2005.
21. D. F. Zhang, L. D. Sun, and C. H. Yan, "Optical properties of ZnO nanoplatelets and rectangular cross-sectioned nanowires," Chem. Phys. Lett., vol. 422, no. 1-3, pp. 46-50, Apr. 2006.
22. X. Y. Han, J. N. Dai, C. H. Yu, Z. H. Wu, C. Q. Chen, and Y. H. Gao, "Characterization of a-plane orientation ZnO film grown on GaN/sapphire template by pulsed laser deposition," Appl. Surf. Sci., vol. 256, no. 14, pp. 4682-4686, May 2010.
23. X. Q. Zhang, Z. G. Yao, S. H. Huang, I. Suemune, and H. Kumano, "Intrinsic exciton transitions in high-quality ZnO thin films grown by plasmaenhanced molecular-beam epitaxy on sapphire substrates," J. Appl. Phys., vol. 99, no. 6, pp. 063 709-1-063 709-4, Mar. 2006.