Epitaxial ZnO piezoelectric thin films for saw filters

Materials Science in Semiconductor Processing

Volumn 2, Issue 3, 1999, Pages 247-252

  Emanetoglu, N W ^a   Gorla, C ^b   Liu, Y ^a   Liang, S ^a   Lu, Y ^a  

^a RUTGERS UNIVERSITY   (United States)

^b RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001438562     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(99)00022-0     Document Type: Article

References (17)

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