Photoluminescence and heteroepitaxy of ZnO on sapphire substrate (0001) grown by rf magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 6, 2000, Pages 2864-2868

  Kim, Kyoung Kook ^a,b   Song, Jae Hoon ^a   Jung, Hyung Jin ^a   Choi, Won Kook ^a   Park, Seong Ju ^b   Song, Jong Han ^a   Lee, Jeong Yong ^c  

^a Korea Institute of Science and Technology   (South Korea)

^b Gwangju Institute of Science and Technology (GIST)   (South Korea)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; FILM GROWTH; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

FULL WIDTH AT HALF MAXIMUM (FWHM);

SEMICONDUCTING FILMS;

EID: 0034318657     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1318192     Document Type: Article

References (15)

1. For a review, see, for example, S. Nakamura and G. Fasol, The Blue Laser Diode (Springer, Berlin, 1997);
2. also S. Strite and H. Morkoç, J. Vac. Sci. Technol. B 10, 1237 (1992), and references therein.
3. P. Yu, Z. K. Tang, G. K. L. Wong, M. Kawasaki, A. Ohtomo, H. Koinuma, and Y. Segawa, J. Cryst. Growth 184, 601 (1998).
4. D. C. Reynolds, D. C. Look, and B. Jogai, Solid State Commun. 99, 873 (1996).
5. T. Minami, H. Nanto, and S. Takata, Jpn. J. Appl. Phys., Part 2 23, L280 (1984).
6. M. Kawasaki, A. Ohtomo, H. Koinuma, Z. K. Tang, P. Yu, G. K. L. Wong, B. P. Zhang, and Y. Segawa, Mater. Sci. Eng., B 56, 239 (1998).
7. D. M. Bagnall, Y. F. Chen, Z. Zhu, and T. Yao, Appl. Phys. Lett. 70, 2230 (1997).
8. R. D. Vispute, V. Talyansky, Z. Trajanovic, S. Choopun, M. Downes, R. P. Shrama, and T. Venkatesan, Appl. Phys. Lett. 70, 2235 (1997).
9. M. A. L. Jonson, S. Fuijta, W. H. Rowland, Jr., W. C. Hughes, J. W. Cook, and J. F. Schetzina, J. Electron. Mater. 21, 157 (1992).
10. T. Duetchprom, K. Hiramatsu, H. Amano, and I. Akasaki, Appl. Phys. Lett. 61, 2688 (1992).
11. F. Hamdani et al., J. Appl. Phys. 83, 983 (1998).
12. J. Narayan, K. Dovidenko, A. K. Sharma, and S. Oktyabrsky, Appl. Phys. Lett. 84, 2587 (1998).
13. R. D. Vispute, V. Talyansky, Z. Trajanovic, S. Choopun, R. P. Shrama, and T. Venkatesan, Appl. Phys. Lett. 73, 348 (1998).
14. K. Dovidenko, S. Oktyabrsky, J. Narayan, and M. Razeghi, J. Appl. Phys. 97, 2439 (1996).
15. F. A. Ponce, D. P. Bour, and W. Gotz, Appl. Phys. Lett. 68, 57 (1996).