Development of a reliable micro-hotplate with low power consumption

IEEE Sensors Journal

Volumn 11, Issue 4, 2011, Pages 913-919

  Xu, Lei ^a,b   Li, Tie ^b   Gao, Xiuli ^b   Wang, Yuelin ^b  

^a UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Al2O3; low power consumption; micro hotplate; Pt; reliability

Indexed keywords

ADHESIVE LAYERS; AL2O3; CORNER COMPENSATION; HIGH RELIABILITY; LONG TERM STABILITY; LOW POWER CONSUMPTION; LOW RESISTANCE; MECHANICAL STRENGTH; MICRO-HOTPLATE; POWER CONSUMPTION; PT; PULSED-MODE OPERATION; RESPONSE TIME; SLENDER BEAMS; TEST RESULTS;

ALUMINUM; ATOMIC LAYER DEPOSITION; PLATINUM; RELIABILITY; STRESSES;

ELECTRIC POWER SUPPLIES TO APPARATUS;

EID: 79951537763     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2064765     Document Type: Article

References (22)

1. M. Y. Afridi, J. S. Suehle, M. E. Zaghloul, D. W. Berning, A. R. Hefner, R. E. Cavicchi, S. Semancik, C. B. Montgomery, and C. J. Taylor, "A monolithic CMOS microhotplate-based gas sensor system," IEEE Sensors (Pubitemid 44357865)
2. P. T. Moseley, "Solid state gas sensors," Meas. Sci. Technol., vol. 8, pp. 223-237, 1997. (Pubitemid 127585977)
3. D. N. Pagonis, G. Kaltsas, and A. G. Nassiopoulou, "Fabrication and testing of an integrated thermal flow sensor employing thermal isolation by a porous silicon membrane over an air cavity," J. Micromech. Microeng., vol. 14, pp. 793-797, 2004.
4. F. T. Zhang, Z. Tang, J. Yu, and R. C. Jin, "A micro-Pirani vacuum gauge based on micro-hotplate technology," Sens. Actuators A, Phys., vol. 126, no. 2, pp. 300-305, Feb. 2006. (Pubitemid 43165638)
5. M. weber, P. Lerch, and P. Renaud, "Improved design for fast modulating IR sources," J. Micromech. Microeng., vol. 7, pp. 210-213, 1997. (Pubitemid 127607081)
6. W. Konz, J. Hildenbrand, M. Bauersfeld, S. Hartwig, A. Lambrecht, V. Lehmann, and J. Wöllenstein, "Micromachined IR-source with excellent blackbody like behavior," Proc. SPIE, vol. 5836, p. 540, 2005.
7. D.-S. Lee, C.-H. Shim, J.-W. Lim, J.-S. Huh, D.-D. Lee, and Y.-T. Kim, "A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air," Sens. Actuators B, Chem., vol. 83, no. 1-3, pp. 250-255, Mar. 2002. (Pubitemid 34232252)
8. J. C. Belmonte, J. Puigcorbé, J. Arbiol, A. Vilà, J. R. Morante, N. Sabaté, I. Gràcia, and C. Cané, "High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications," Sens. Actuators B, Chem., vol. 114, no. 2, pp. 826-835, Apr. 2006.
9. F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier, and H. Möller;, "A modular system of SiC-based microhotplates for the application in metal oxide gas sensors," Sens. Actuators B, Chem., vol. 64, no. 1-3, pp. 95-101, Jun. 2000.
10. S. K. H. Fung, Z. Tang, P. C. H. Chan, J. K. O. Sin, and P. W. Cheung, "Thermal analysis and design of a micro-hotplate for integrated gassensor applications," Sens. Actuators A, Phys., vol. 54, no. 1-3, pp. 482-487, Jun. 1996. (Pubitemid 126356998)
11. I. Simon, N. Bârsan, M. Bauer, and U.Weimar, "Micromachined metal oxide gas sensors: Opportunities to improve sensor performance," Sens. Actuators B, Chem., vol. 73, no. 1, pp. 1-26, Feb. 2001. (Pubitemid 32874436)
12. J. Lee and W. P. King, "Microcantilever hotplates: Design, fabrication, and characterization," Sens. Actuators A, Phys., vol. 136, no. 1, pp. 291-298, May 2007. (Pubitemid 46590662)
13. P. Furjes, Z. Vizvary, M. Adam, I. Barsony, A. Morrissey, and C. Ducso, "Materials and processing for realization of micro-hotplates operated at elevated temperature," J. Micromech. Microeng., vol. 12, pp. 425-429, 2002. (Pubitemid 34830219)
14. R. M. Tiggelaar, "Silicon-based microreactors for high-temperature heterogeneous partial oxidation reactions," Ph.D. dissertation, Univ. Twente, Enschede, The Netherlands, 2004.
15. S. M. Lee, D. C. Dyer, and J. W. Gardner, "Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors," Microelectron. J., vol. 34, no. 2, pp. 115-126, Feb. 2003.
16. C. Mastrangelo and W. Tang, "Semiconductor sensor technologies," in Semiconductor Sensors, S. Sze, Ed. New York: Wiley, 1994, ch. 2, pp. 17-95.
17. H. Low, M. Tse, and M. Chiu, "Thermal induced stress on the membrane in integrated gas sensor with micro-heater," in Proc. IEEE Hong Kong Electron Devices Meeting, 1998, pp. 140-143.
18. x membrane for microheater applications," Sens. Actuators A, Phys., vol. 64, pp. 241-245, 1998. (Pubitemid 128378543)
19. S. Hamann, M. Ehmann, S. Thienhaus, A. Savan, and A. Ludwig, "Micro-hotplates for high-throughput thin film processing and in situ phase transformation characterization," Sens. Actuators A, Phys., vol. 147, no. 2, pp. 576-582, Oct. 2008.
20. V. Guidi, G. C. Cardinali, L. Dori, G. Faglia, M. Ferroni, G. Martinelli, P. Nelli, and G. Sberveglieri, "Thin-film gas sensor implemented on a low-power-consumption micromachined silicon structure," Sens. Actuators B, Chem., vol. 49, no. 1-2, pp. 88-92, Jun. 1998. (Pubitemid 128458050)
21. T. Maeder, L. Sagalowicz, and P. Muralt, "Stabilized Platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers," Jpn. J. Appl., vol. 37, pp. 2007-2012, 1998.
22. J.-M. Bosc, Y. Guo, V. Sarihan, and T. Lee, "Accelerated life testing for micro-machined chemical sensors," IEEE Trans. Rel., vol. 47, no. 2, pp. 135-141, Jun. 1998. (Pubitemid 128744681)