Improved design for fast modulating IR sources

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 210-213

  Weber, M ^a   Lerch, Ph ^a   Renaud, Ph ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COST EFFECTIVENESS; INFRARED RADIATION; THIN FILM DEVICES;

INFRARED SOURCES;

INFRARED DEVICES;

EID: 0031224544     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/034     Document Type: Article

References (7)

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2. Murata A, Yamashita K, Okuyama M and Hamakawa Y 1996 Capacitance-detection type of infrared sensor using Si-diaphragm Tech. Digest 14th Sensor Symp. 1996
3. Chévrier J B, Baert K, Slater T and Verbist A 1994 Micromachined infrared pneumatic detector for gas sensor Proc. Microsystem Technologies '94 (Berlin) 1994
4. Rosencwaig A 1980 Photoacoustics and Photoacoustic Spectroscopy (New York: Wiley)
5. Bögli U et al 1988 Photoacustik: eine gasanalysemethode im vergleich Gaz-Wasser-Abwasser 68. Jahrg. 192 4
6. Demarne V and Grisel A 1988 An integrated low-power thin-film CO gas sensor on silicon Sens. Actuators 13 (4) 301-13
7. Mutschall D, Scheibe C and Obermeier E 1995 Basic micro module for chemical sensors with on chip heater and buried sensor structure Proc. Transducers '95 (Stockholm) June 25-29 1995