Micro-hotplates for high-throughput thin film processing and in situ phase transformation characterization

Sensors and Actuators, A: Physical

Volumn 147, Issue 2, 2008, Pages 576-582

  Hamann, S ^a,b   Ehmann, M ^a   Thienhaus, S ^a,b   Savan, A ^a   Ludwig, A ^a,b  

^a CENTER OF ADVANCED EUROPEAN STUDIES AND RESEARCH CAESAR   (Germany)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

High throughput processing characterization; In situ characterization; Micro hotplates; Quenching

Indexed keywords

INTERMETALLICS; OPTICAL DESIGN; PHASE TRANSITIONS; SILICON COMPOUNDS; THICK FILMS; THIN FILMS; VAPOR DEPOSITION;

HIGH THROUGHPUTS; HIGH-THROUGHPUT PROCESSING/CHARACTERIZATION; IN SITU CHARACTERIZATION; IN-SITU; MICRO SYSTEM TECHNOLOGY; MICRO-HOTPLATES; PHASE TRANSFORMATION; QUENCHING; THERMAL PROCESSING; THIN-FILM PROCESSING;

IN SITU PROCESSING;

EID: 49649129854     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.05.007     Document Type: Article

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