A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air

Sensors and Actuators, B: Chemical

Volumn 83, Issue 1-3, 2002, Pages 250-255

  Lee, Dae Sik ^a   Shim, Chang Hyun ^b   Lim, Jun Woo ^b   Huh, Jeung Soo ^b   Lee, Duk Dong ^b   Kim, Youn Tae ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

Explosive gases; Microgas sensor; Microhotplate; Tin oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; MAGNETRON SPUTTERING; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TIN COMPOUNDS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

MICROSENSOR ARRAYS;

MICROSENSORS;

EID: 0037088619     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01057-7     Document Type: Conference Paper

References (16)

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7. Some basic aspects of semiconductor gas sensors
8. 2-x thin film with added Pt fabricated by the dipping method