Thermal induced stress on the membrane in integrated gas sensor with micro-heater

Proceedings - 1998 IEEE Hong Kong Electron Devices Meeting, HKEDM 1998

Volumn 1998-August, Issue , 1998, Pages 140-143

  Low, Huei Ming ^a   Tse, Man Siu ^a   Chiu, Man Ming ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; GAS DETECTORS; HEATING EQUIPMENT; MOS DEVICES; OXIDE FILMS; SILICON NITRIDE; SILICON OXIDES;

CONTROL OF STRESS; DIELECTRIC MEMBRANES; FINITE ELEMENT SIMULATIONS; INTEGRATED GAS SENSORS; OPERATION TEMPERATURE; RELIABLE OPERATION; SILICON NITRIDE FILM; THERMAL INDUCED STRESS;

MEMBRANES;

EID: 85017911888     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/HKEDM.1998.740206     Document Type: Conference Paper

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