Freestanding piezoelectric rings for high efficiency energy harvesting at low frequency

Applied Physics Letters

Volumn 98, Issue 5, 2011, Pages

  Massaro, Alessandro ^a   De Guido, Stefano ^b   Ingrosso, Ilaria ^b   Cingolani, Roberto ^a   De Vittorio, Massimo ^b   Cori, Marco ^c   Bertacchini, Alessandro ^c   Larcher, Luca ^c   Passaseo, Adriana ^b  

^a ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

^b INFM   (Italy)

^c UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; HIGH EFFICIENCY; HIGH ENERGY EFFICIENCY; HIGH POWER DENSITY; LOW FREQUENCY; LOW RESONANCE FREQUENCY; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEMS; PIEZOELECTRIC RINGS; PIEZOELECTRIC VIBRATION; POWER DENSITIES; PROOF MASS; TORSIONAL MODES;

ALUMINUM NITRIDE; ENERGY EFFICIENCY; MEMS; MICROELECTROMECHANICAL DEVICES; MOLYBDENUM; NITRIDES; PIEZOELECTRICITY; RESONANCE;

ENERGY HARVESTING;

EID: 79951495827     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3551725     Document Type: Article

References (33)

1. S. Roundy, E. S. Leland, J. Baker, E. Carleton, E. Reilly, E. Lai, B. Otis, J. M. Rabaey, P. K. Wright, and V. Sundararajan, IEEE Pervasive Comput. 1536-1268 4, 28 (2005). 10.1109/MPRV.2005.14 (Pubitemid 40495603)
2. H. A. Sodano, Shock Vib. Dig. 0583-1024 36, 197 (2004). 10.1177/0583102404043275
3. B. S. Lee, S. C. Lin, W. J. Wu, X. Y. Wang, P. Z. Chang, and C. K. Lee, J. Micromech. Microeng. 0960-1317 19, 1 (2009).
4. W. J. Choi, Y. Jeon, J. -H. Jeong, R. Sood, and S. G. Kim, J. Electroceram. 1385-3449 17, 543 (2006). 10.1007/s10832-006-6287-3
5. B. S. Lee, W. J. Wu, W. P. Shih, D. Vasic, and F. Costa, Proc.-IEEE Ultrason. Symp. 1051-0117 1, 1598 (2007). 10.1109/ULTSYM.2007.402
6. S. Roundy and P. K. Wright, Smart Mater. Struct. 0964-1726 13, 1131 (2004). 10.1088/0964-1726/13/5/018
7. J. D. Adams, G. Parrot, C. Bauer, T. Sant, L. Manning, M. Jones, and B. Rogers, Appl. Phys. Lett. 0003-6951 83, 3428 (2003). 10.1063/1.1621733
8. N. Ledermann, P. Muralt, J. Baborowski, M. Foster, and J. P. Pallaux, J. Micromech. Microeng. 0960-1317 14, 1650 (2004). 10.1088/0960-1317/14/12/008 (Pubitemid 40002286)
9. T. Xu, G. Wu, G. Zhang, and Y. Hao, Sens. Actuators, A 0924-4247 104, 61 (2003). 10.1016/S0924-4247(02)00484-3
10. S. B. Lang and S. Muensit, Appl. Phys. A: Mater. Sci. Process. 0947-8396 85, 125 (2006). 10.1007/s00339-006-3688-8 (Pubitemid 44394583)
11. G. Piazza, P. J. Stephanou, and A. P. Pisano, J. Microelectromech. Syst. 1057-7157 16, 319 (2007). 10.1109/JMEMS.2006.889503 (Pubitemid 46564209)
12. G. Piazza, P. J. Stephanou, and A. P. Pisano, IEEE MTT-S Int. Microwave Symp. Dig. 0149-645X 1, 664 (2006). 10.1109/MWSYM.2006.249702 (Pubitemid 46924310)
13. K. M. Lakin, Proc.-IEEE Ultrason. Symp. 1051-0117 1, 901 (2002).
14. R. A. Johnson, Mechanical Filters in Electronics (Wiley, New York, 1983).
15. Y. B. Jeon, R. Sood, J. H. Jeong, and S. G. Kim, Sens. Actuators, A 0924-4247 122, 16 (2005). 10.1016/j.sna.2004.12.032 (Pubitemid 41037282)
16. C. B. Williams and R. B. Yates, Sens. Actuators, A 0924-4247 52, 8 (1996). 10.1016/0924-4247(96)80118-X
17. D. Shen, J. -H. Park, J. Ajitsaria, S. -Y. Choe, H. C. Wikle, and D. -J. Kim, J. Micromech. Microeng. 0960-1317 18, 1 (2008).
18. M. Renaud, K. Karakaya, T. Sterken, P. Fiorini, C. V. Hoof, and R. Puers, Sens. Actuators, A 0924-4247 145-146, 380 (2008).
19. S. Roundy, P. K. Wright, and J. Rabaey, Comput. Commun. 0140-3664 26, 1131 (2003). 10.1016/S0140-3664(02)00248-7
20. M. Marzencki, Y. Ammar, and S. Basrour, Sens. Actuators, A 0924-4247 145-146, 363 (2008).
21. R. J. M. Vullers, R. Van Schaijk, I. Doms, C. Van Hoof, and R. Mertens, Solid-State Electron. 0038-1101 53, 684 (2009). 10.1016/j.sse.2008.12.011
22. C. Giordano, I. Ingrosso, M. T. Todaro, G. Maruccio, S. De Guido, R. Cingolani, A. Passaseo, and M. De Vittorio, Microelectron. Eng. 0167-9317 86, 1204 (2009). 10.1016/j.mee.2008.12.075
23. K. Karakaya, M. Renaud, M. Goedbloed, and R. Van Schaijk, Microelectron. Eng. 0167-9317 18, 1 (2008).
24. M. Marzencki, S. Basrour, B. Charlot, S. Spirkovich, and M. Colin, Proceedings of PowerMEMS (2005), p. 45.
25. M. Renaud, T. Sterken, A. Schmitz, P. Fiorini, C. Van Hoof, and R. Puers, Solid State Sensors, Actuators and Microsystems (IEEE, New York, 2007), p. 891.
26. M. Marzencki, Y. Ammar, and S. Basrour, Solid State Sensors, Actuators and Microsystems (IEEE, New York, 2007), p. 887.
27. D. Isarakorn, D. Briand, S. Gariglio, A. Sambri, N. Stucki, J. M. Triscone, F. Guy, J. W. Reiner, C. H. Ahn, and N. F. de Rooji, Proceedings of PowerMEMS (2008), p. 269.
28. H. -U. Kim, V. Bedekar, R. A. Islam, W. Lee, D. Leo, and S. Priya, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 0885-3010 55, 1900 (2008). 10.1109/TUFFC.881
29. H. Fang, J-Q Liu, Z-Y Zu, L. Dong, L. Wang, D. Chen, B-C Cai, and Y. Liu, Microelectron. J. 0026-2692 37, 1280 (2006). 10.1016/j.mejo.2006.07.023 (Pubitemid 44767769)
30. P. Glynne-Jones, S. P. Beeby, and N. M. White, IEE Proc.: Sci., Meas. Technol. 1350-2344 148, 68 (2001). 10.1049/ip-smt:20010323 (Pubitemid 32944443)
31. H. -U. Kim, W. -H. Lee, H. V. Rasika Dias, and S. Priya, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 0885-3010 1, 1555 (2009).
32. R. Elfrink, T. M. Kamel, M. Goedbloed, S. Matova, D. Hohlfeld, R. van Schaijk, and R. Vullers, Proceedings of PowerMEMS, 249 (2008).
33. S. C. Cripps, RF Power Amplifiers for Wireless Communications (Artech House, Norwood, MA, 1999).