AlN on polysilicon piezoelectric cantilevers for sensors/actuators

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1204-1207

  Giordano, C ^a   Ingrosso, I ^a   Todaro, M T ^a   Maruccio, G ^a   De Guido, S ^a   Cingolani, R ^a   Passaseo, A ^a   De Vittorio, M ^a  

^a INFM   (Italy)

Author keywords

AlN; Cantilever; MEMS; Piezoelectric

Indexed keywords

ALN; ALN THIN FILMS; ALUMINIUM NITRIDES; ATOMIC-FORCE MICROSCOPIES; CANTILEVER; CANTILEVER ARRAYS; DC-MAGNETRON SPUTTERING; ELECTRICAL MEASUREMENTS; ETCHING PROCESS; FABRICATED STRUCTURES; INERTIAL SENSORS; MICROMACHINING TECHNIQUES; OPTICAL LITHOGRAPHIES; PIEZOELECTRIC; PIEZOELECTRIC CANTILEVERS; POLY-SI; RESONANCE FREQUENCIES; THIN ELASTIC LAYERS; VERTICAL DISPLACEMENTS;

ALUMINUM COMPOUNDS; ATOMIC FORCE MICROSCOPY; FABRICATION; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MOLYBDENUM; NATURAL FREQUENCIES; NITRIDES; PHOTOLITHOGRAPHY; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; POLYSILICON;

NANOCANTILEVERS;

EID: 67349259300     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.075     Document Type: Article

References (14)

1. Olivares J., Iborra E., Clement M., Vergara L., Sangrador J., and Sanz-Hervas A. Sensors and Actuators A 123-124 (2005) 590-595
2. Tonisch K., Cimalla V., Foerster Ch., Romanus H., Ambacher O., and Dontsov D. Sensors and Actuators A 132 (2006) 658-663
3. Trolier-McKinstry S., and Muralt P. Journal of Electroceramics 12 (2004) 7-17
4. Sama N., Herdier R., Jenkins D., Soyer C., Remiens D., Detalle M., and Bouregba R. Journal of Crystal Growth 310 (2008) 3299-3302
5. Ingrosso I., Petroni S., Altamura D., De Vittorio M., Combi C., and Passaseo A. Microelectronic Engineering 84 (2007) 1320-1324
6. Andrei A., Krupa K., Jozwik M., Delobelle P., Hirsinger L., Gorecki C., Nieradko L., and Meunier C. Sensors and Actuators A 141 (2008) 565-576
7. Iborra E., Olivares J., Clement M., Vergara L., Sanz-Hervás A., and Sangrador J. Sensors and Actuators A 115 (2004) 501-507
8. Sanz-Hervas A., Vergara L., Olivares J., Iborra E., Morilla Y., Garci{dotless}a-Lopez J., Clement M., Sangrador J., and Respaldiza M.A. Diamond and Related Materials 14 3-7 (2005) 1198-1202
9. Kamohara T., Akiyama M., Ueno N., and Kuwano N. Journal of Crystal Growth 310 (2008) 345-350
10. Ishihara M., Li S.J., Yumoto H., Akashi K., and Ide Y. Thin Solid Films 316 (1998) 152-157
11. C. Giordano, I. Ingrosso, M. Grande, A. Qualtieri, M. Pugliese, M.T. Todaro, V. Tasco, M. De Vittorio, A. Passaseo, in: Proceedings of the ECAPD'9, Ferroelectrics, submitted for publication.
12. M. Clement, S. González-Castilla, J. Olivares, J. Malo, J.I. Izpura, E. Iborra, J. Sangrador, Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum IEEE International, 2007, pp. 374-377.
13. Mortet V., Petersen R., Haenen K., and D'Olieslaeger M. Applied Physics Letters 88 (2006) 133511
14. Mortet V., Nesladek M., Haenen K., Morel A., D'Olieslaeger M., and Vanecek M. Diamond and Related Materials 13 (2004) 1120-1124