Piezoelectric harvesters and MEMS technology: Fabrication, modeling and measurements

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 891-894

  Renaud, M ^a,b   Sterken, T ^a,b   Schmitz, A ^a   Fiorini, P ^a   Van Hoof, C ^a,b   Puers, R ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Energy harvester; Micromachining; Piezoelectricity

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; ESTIMATION; FIBER LASERS; HARVESTERS; LATTICE VIBRATIONS; MICROSYSTEMS; MODEL STRUCTURES; OPTICAL DESIGN; SENSORS; TECHNOLOGY; TRANSDUCERS; VIBRATIONS (MECHANICAL);

ENERGY HARVESTER; INTERNATIONAL CONFERENCES; MAXIMUM OUTPUT POWER; MECHANICAL VIBRATIONS; MEMS TECHNOLOGY; MICROMACHINING; MICROMACHINING TECHNOLOGIES; OUTPUT POWERS; PIEZOELECTRIC ENERGY; PIEZOELECTRIC STRUCTURES; RESISTIVE LOADS; SINUSOIDAL OSCILLATIONS; SOLID-STATE SENSORS;

PIEZOELECTRICITY;

EID: 50049127255     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300274     Document Type: Conference Paper

References (3)

1. A. Schmitz, T. Sterken, M. Renaud, P. Fiorini, R. Puers and C. Va n Hoof, "Piezoelectric scavengers in MEMS technology: Fabrication and Simulation", Proceedings of PowerMEMS 2005, Kyoto, Japan, pp. 61-64, 2005.
2. N.H. Hagood and A. von Flotow, "Damping of structural vibration with piezoelectric materials and passive electrical networks", J. Sound and Vibr. 146, pp. 243-268, 1991.
3. S. Roundy and P.K. Wright, "A piezoelectric vibration based generator for wireless electronics", Smart Materials and Structures 13, Number 5, pp. 1131-1142, 2004.