Analysis of a micro-electric generator for microsystems

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 8-11

  Williams, Connel B ^a   Yates, Rob B ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

Batteries; Generators; MEMS; Power supplies; Vibration

Indexed keywords

DIRECT ENERGY CONVERSION; ELECTRIC POWER SUPPLIES TO APPARATUS; RENEWABLE ENERGY RESOURCES; VIBRATIONS (MECHANICAL);

MICROELECTRIC GENERATORS; MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030102028     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80118-X     Document Type: Article

References (4)

1. D.M. Rowe, D.V. Morgan and J.H. Kiely, Low cost miniature thermoelectric generator, Electron. Lett., 27 (1991) 2332-2334.
2. W.T. Thomson, Theory of Vibration with Applications, Prentice-Hall, Englewood Cliffs, 1972.
3. W. Kuntz and R. Mores, Electrically insulated smart sensors: principles for operation and supply, Sensors and Actuators A, 25-27 (1991) 497-505.
4. Y. Zhang and K.D. Wise, Performance of non-planar silicon diaphragms under large deflections, J. Microelectromech. Syst., 3 (1994) 59-68.