Power harvesting using piezoelectric MEMS generator with interdigital electrodes

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1598-1601

  Lee, B S ^a   Wu, W J ^a   Shih, W P ^a   Vasic, D ^b   Costa, F ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b Centre National de la Recherche Scientifique   (France)

Author keywords

Interdigital electrodes; MEMS generator; Power harvesting; PZT deposition

Indexed keywords

DEPOSITS; ELECTRIC GENERATORS; ELECTRODES; FERROELECTRIC CERAMICS; LEAD ZIRCONATE TITANATE; LOW POWER ELECTRONICS; PIEZOELECTRICITY; PRESTRESSED BEAMS AND GIRDERS; SILICON WAFERS; STRAIN ENERGY; VIBRATIONS (MECHANICAL); VLSI CIRCUITS;

INTEGRATED WIRELESS SENSOR; INTERDIGITAL ELECTRODE; MECHANICAL ENERGIES; MEMS GENERATOR; PIEZOELECTRIC LAYERS; POWER HARVESTING; PROCESS DEVELOPMENT; PZT DEPOSITION;

ENERGY HARVESTING;

EID: 48149110295     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.402     Document Type: Conference Paper

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