메뉴 건너뛰기




Volumn 55, Issue 9, 2008, Pages 1900-1905

Laser-machined piezoelectric cantilevers for mechanical energy harvesting

Author keywords

[No Author keywords available]

Indexed keywords

CONSTANT FORCE; ELECTRICAL PROPERTIES; FABRICATED DEVICES; LASER MACHINING; LOW FREQUENCIES; MACHINING PROCESSES; MECHANICAL ENERGIES; MICROELECTRONICS PACKAGING; PIEZOELECTRIC CANTILEVERS;

EID: 52749088724     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.881     Document Type: Article
Times cited : (42)

References (13)
  • 1
    • 22844431664 scopus 로고    scopus 로고
    • MEMS power generator with transverse mode thin film PZT
    • Y. B. Jeon, R. Sood, J. H. Jeong, and S. G. Kim, "MEMS power generator with transverse mode thin film PZT," Sens. Actuators, vol. 122, no. 1, pp. 16-22, 2005.
    • (2005) Sens. Actuators , vol.122 , Issue.1 , pp. 16-22
    • Jeon, Y.B.1    Sood, R.2    Jeong, J.H.3    Kim, S.G.4
  • 3
    • 33745840839 scopus 로고    scopus 로고
    • B.-S. Lee, J.-J. He, W.-J. Wu, and W.-P. Shih, MEMS generator of power harvesting by vibrations using piezoelectric cantilever beam with digitate electrode, Proc. SPIE, Smart Struct. Mater, 6169, p. B1690, 2006. Shashank Priya received his B.Sc. degree in physics from Allahabad University, India, his B.S. and M.S. degrees in metallurgy from the Indian Institute of Science, Bangalore, India, and his Ph.D. degree in materials engineering from Pennsylvania State University, PA, in 1995, 1998, 2000, and 2003, respectively. He is currently associate professor in the Department of Materials Science and Engineering and Department of Mechanical Engineering at Virginia Tech, Blacksburg, VA. Prior to joining Virginia Tech (VT, Dr. Priya was asst. professor at The University of Texas at Arlington UTA, His research interests include piezoelectric and ferroelectric devices, energy harvesting, ceramic processing, thin film heterostructures, physics of electronic materials
    • B.-S. Lee, J.-J. He, W.-J. Wu, and W.-P. Shih, "MEMS generator of power harvesting by vibrations using piezoelectric cantilever beam with digitate electrode," Proc. SPIE, Smart Struct. Mater., vol. 6169, p. B1690, 2006. Shashank Priya received his B.Sc. degree in physics from Allahabad University, India, his B.S. and M.S. degrees in metallurgy from the Indian Institute of Science, Bangalore, India, and his Ph.D. degree in materials engineering from Pennsylvania State University, PA, in 1995, 1998, 2000, and 2003, respectively. He is currently associate professor in the Department of Materials Science and Engineering and Department of Mechanical Engineering at Virginia Tech, Blacksburg, VA. Prior to joining Virginia Tech (VT), Dr. Priya was asst. professor at The University of Texas at Arlington (UTA). His research interests include piezoelectric and ferroelectric devices, energy harvesting, ceramic processing, thin film heterostructures, physics of electronic materials, magnetoelectrics, high power devices and micro electromechanical devices. He has authored 80 publications in peer-reviewed international journals and 4 patents. He is Secretary of Electronics Division, American Ceramic Society, and chair and founder of the Energy Harvesting Workshop series.
  • 4
    • 33846077160 scopus 로고    scopus 로고
    • Energy harvesting vibration sources for microsystems applications
    • S. P. Beeby, M. J. Tudor, and N. M. White, "Energy harvesting vibration sources for microsystems applications," Meas. Sci. Technol., vol. 17, no. 12, pp. R175-R195, 2006.
    • (2006) Meas. Sci. Technol , vol.17 , Issue.12
    • Beeby, S.P.1    Tudor, M.J.2    White, N.M.3
  • 5
    • 58149486175 scopus 로고    scopus 로고
    • Piezoelectric microgenerator-Current status, challenges, and applications
    • H. Kim and S. Priya, "Piezoelectric microgenerator-Current status, challenges, and applications," in Proc. Int. Symp. Appl. Ferroelectr., 2008.
    • (2008) Proc. Int. Symp. Appl. Ferroelectr
    • Kim, H.1    Priya, S.2
  • 7
    • 2542479730 scopus 로고    scopus 로고
    • E'ciency of energy conversion for devices containing a piezoelectric component
    • C. D. Richards, M. J. Anderson, D. F. Bahr, and R. F. Richards, "E'ciency of energy conversion for devices containing a piezoelectric component," J. Micromech. Microeng., vol. 14, no. 5, pp. 717-721, 2004.
    • (2004) J. Micromech. Microeng , vol.14 , Issue.5 , pp. 717-721
    • Richards, C.D.1    Anderson, M.J.2    Bahr, D.F.3    Richards, R.F.4
  • 9
    • 33747615221 scopus 로고    scopus 로고
    • Piezo-Bow'-High displacement and high blocking force actuator
    • M. Joshi and S. Priya, "Piezo-Bow'-High displacement and high blocking force actuator," Integ. Ferroelectrics, vol. 82, no. 1, pp. 25-43, 2006.
    • (2006) Integ. Ferroelectrics , vol.82 , Issue.1 , pp. 25-43
    • Joshi, M.1    Priya, S.2
  • 10
    • 29144515335 scopus 로고    scopus 로고
    • Micromachining of PZT using ultrafast femtosecond laser
    • N. Uppal, P. Shiakolas, and S. Priya, "Micromachining of PZT using ultrafast femtosecond laser," Ferroelectr., vol. 32, no. 3-4, pp. 67-77, 2006.
    • (2006) Ferroelectr , vol.32 , Issue.3-4 , pp. 67-77
    • Uppal, N.1    Shiakolas, P.2    Priya, S.3
  • 11
    • 52749095532 scopus 로고    scopus 로고
    • Piezoelectric ceramics: Principles and applications, Mackeyville, PA: APC International, Ltd., 2002.
    • Piezoelectric ceramics: Principles and applications," Mackeyville, PA: APC International, Ltd., 2002.
  • 12
    • 34948818244 scopus 로고    scopus 로고
    • Consideration of impedance matching techniques for e'cient piezoelectric energy harvesting
    • H. Kim, S. Priya, H. Stephanou, and K. Uchino, "Consideration of impedance matching techniques for e'cient piezoelectric energy harvesting," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 54, pp. 1851-1859, 2007.
    • (2007) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.54 , pp. 1851-1859
    • Kim, H.1    Priya, S.2    Stephanou, H.3    Uchino, K.4
  • 13
    • 33746814442 scopus 로고    scopus 로고
    • Modeling of piezoelectric energy harvesting using cymbal transducers
    • H. Kim, S. Priya, and K. Uchino, "Modeling of piezoelectric energy harvesting using cymbal transducers," Jpn. J. Appl. Phys., vol. 45, no. 7, pp. 5836-5840, 2006.
    • (2006) Jpn. J. Appl. Phys , vol.45 , Issue.7 , pp. 5836-5840
    • Kim, H.1    Priya, S.2    Uchino, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.