Confinement and flow dynamics in thin polymer films for nanoimprint lithography

Applied Physics Letters

Volumn 98, Issue 1, 2011, Pages

  Teisseire, Jérémie ^a   Revaux, Amélie ^a   Foresti, Maud ^a   Barthel, Etienne ^a  

^a SAINT GOBAIN RECHERCHE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CONFINED POLYMERS; FLOW DYNAMICS; GLASS TRANSITION TEMPERATURE; NEWTONIAN VISCOSITY; PRIMARY MECHANISM; RHEOLOGICAL PROPERTY; SIMPLE EXPRESSION; THIN POLYMER FILMS;

GLASS TRANSITION; PLASTIC FILMS; POLYMER FILMS; POLYMERIC FILMS; POLYMERS; PROCESS ENGINEERING; RHEOLOGY; VISCOSITY;

NANOIMPRINT LITHOGRAPHY;

EID: 78651284374     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3535614     Document Type: Article

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