Measurement of thermal properties of thin films up to high temperatures-Pulsed photothermal radiometry system and Si-B-C-N films

Review of Scientific Instruments

Volumn 81, Issue 12, 2010, Pages

  Martan, J ^a   Capek J ^a   Chalhoub, E Amin ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

BULK SAMPLES; CHEMICAL COMPOSITIONS; EFFUSIVITY; HIGH SPEED MACHINING; HIGH TEMPERATURE; HIGH-TEMPERATURE ELECTRONICS; HIGHER TEMPERATURES; INDEPENDENT MEASUREMENT; MEASUREMENT OF THERMAL PROPERTIES; MEASUREMENT SYSTEM; MECHANICAL AND THERMAL PROPERTIES; PULSED PHOTOTHERMAL RADIOMETRY; ROOM TEMPERATURE; SI-B-C-N FILMS; SIMULTANEOUS DETERMINATIONS; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE; THERMAL PROPERTIES; THERMAL STABILITY; VACUUM CHAMBERS;

AMORPHOUS MATERIALS; CALORIMETRY; CERAMIC MATERIALS; CHEMICAL STABILITY; MACHINING; MECHANICAL PROPERTIES; RADIOMETERS; RADIOMETRY; SEMICONDUCTING SILICON COMPOUNDS; SPECIFIC HEAT; THERMAL CONDUCTIVITY; THIN FILMS; TUNGSTEN; VACUUM;

THERMAL CONDUCTIVITY OF SOLIDS;

EID: 78650880810     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3506638     Document Type: Article

References (35)

1. D. G. Cahill, Microscale Thermophys. Eng. 1, 85 (1997). 10.1080/108939597200296
2. J. Martan, Thermo-kinetic model of laser-material interaction in the form of criteria equations., Ph.D. dissertation (Universitey of West Bohemia in Plzen, Czech Republic, Universitey of Orleans, France, 2005).
3. J. apek, S. Heben, P. Zeman, J. Vlek, R. erstv, and J. Houka, Surf. Coat. Technol. 203, 466 (2008). 10.1016/j.surfcoat.2008.07.025
4. J. Vlek, S. Heben, J. Kala, J. apek, P. Zeman, R. erstv, V. Peina, and Y. Setsuhara, J. Vac. Sci. Technol. A 26, 1101 (2008). 10.1116/1.2949232
5. H. P. Baldus, M. Jansen, and D. Sporn, Science 285, 699 (1999). 10.1126/science.285.5428.699 (Pubitemid 29484531)
6. J. Vlek,. Potock, J. ek, J. Houka, M. Kormunda, P. Zeman, V. Peina, J. Zemek, Y. Setsuhara, and S. Konuma, J. Vac. Sci. Technol. A 23, 1513 (2005). 10.1116/1.2049298 (Pubitemid 43119386)
7. D. Hegemann, R. Riedel, and C. Oehr, Chem. Vap. Deposition 5, 61 (1999). 10.1002/(SICI)1521-3862(199903)5:261::AID-CVDE613.0.CO;2-Z
8. A. Vijayakumar, A. P. Warren, R. M. Todi, and K. B. Sundaram, J. Mater. Sci. 20, 144 (2009).
9. P. A. Ramakrishnan, Y. T. Wang, D. Balzar, L. An, C. Haluschka, R. Riedel, and A. M. Hermann, Appl. Phys. Lett. 78, 3076 (2001). 10.1063/1.1370540
10. A. J. Schmidt, R. Cheaito, and M. Chiesa, Rev. Sci. Instrum. 80, 094901 (2009). 10.1063/1.3212673
11. Y. K. Koh, S. L. Singer, W. Kim, J. M. O. Zide, H. Lu, D. G. Cahill, A. Majumdar, and A. C. Gossard, J. Appl. Phys. 105, 054303 (2009). 10.1063/1.3078808
12. T. Bechtold, D. Hohlfeld, E. B. Rudnyi, and M. Gunther, J. Micromech. Microeng. 20, 045030 (2010). 10.1088/0960-1317/20/4/045030
13. R. Kato, A. Maesono, and R. P. Tye, Int. J. Thermophys. 22, 617 (2001). 10.1023/A:1010745603645
14. H.-C. Chien, D.-J. Yao, M.-J. Huang, and T.-Y. Chang, Rev. Sci. Instrum. 79, 054902 (2008). 10.1063/1.2927253 (Pubitemid 351776642)
15. K. D. Harris, D. Vick, E. J. Gonzalez, T. Smy, K. Robbie, and M. J. Brett, Surf. Coat. Technol. 138, 185 (2001). 10.1016/S0257-8972(00)01155-5 (Pubitemid 32235756)
16. C. Garcia-Segundo, M. Villagran-Muniz, and S. Muhl, J. Phys. D: Appl. Phys. 42, 055405 (2009). 10.1088/0022-3727/42/5/055405
17. J. Martan, N. Semmar, C. Leborgne, E. Le Menn, and J. Mathias, Appl. Surf. Sci. 247, 57 (2005). 10.1016/j.apsusc.2005.01.062 (Pubitemid 40743440)
18. W. P. Leung and A. C. Tam, J. Appl. Phys. 56, 153 (1984). 10.1063/1.333739 (Pubitemid 14629960)
19. J. Martan, O. Herve, and V. Lang, J. Appl. Phys. 102, 064903 (2007). 10.1063/1.2778642 (Pubitemid 47508999)
20. S.-M. Lee and D. G. Cahill, Microscale Thermophys. Eng. 1, 47 (1997). 10.1080/108939597200421
21. D. G. Cahill, W. K. Ford, K. E. Goodson, G. D. Mahan, A. Majumdar, H. J. Maris, R. Merlin, and S. R. Phillpot, J. Appl. Phys. 93, 793 (2003). 10.1063/1.1524305
22. T. Maekawa, K. Kurosaki, T. Tanaka, and S. Yamanaka, Surf. Coat. Technol. 202, 3067 (2008). 10.1016/j.surfcoat.2007.11.017 (Pubitemid 351722763)
23. M. Kuwahara, O. Suzuki, Y. Yamakawa, N. Taketoshi, T. Yagi, P. Fons, T. Fukaya, J. Tominaga, and T. Baba, Microelectron. Eng. 84, 1792 (2007). 10.1016/j.mee.2007.01.178 (Pubitemid 46678482)
24. S. Shin, T.-J. Ha, H.-H. Park, and H. H. Cho, J. Phys. D: Appl. Phys. 42, 125404 (2009). 10.1088/0022-3727/42/12/125404
25. D. R. Queen and F. Hellman, Rev. Sci. Instrum. 80, 063901 (2009). 10.1063/1.3142463
26. D. L. Balageas, J. C. Krapez, and P. Cielo, J. Appl. Phys. 59, 348 (1986). 10.1063/1.336690 (Pubitemid 17615432)
27. MPDB-Temperature Dependent Elastic Thermal Properties Database, http://www.jahm.com/
28. H.-S. Yang, J. W. Kim, G. H. Park, C. S. Kim, K. Kyhm, S. R. Kim, K. C. Kim, and K. S. Hong, Thermochim. Acta 455, 50 (2007). 10.1016/j.tca.2006.11.030
29. B. C. Gundrum, D. G. Cahill, and R. S. Averback, Phys. Rev. B 72, 245426 (2005). 10.1103/PhysRevB.72.245426 (Pubitemid 43292177)
30. T. Coquil, E. K. Richman, N. J. Hutchinson, S. H. Tolbert, and L. Pilon, J. Appl. Phys. 106, 034910 (2009). 10.1063/1.3182826
31. J. R. Nicholls, K. J. Lawson, A. Johnstone, and D. S. Rickerby, Surf. Coat. Technol. 383, 151-152 (2002).
32. S.-M. Lee, D. G. Cahill, and R. Venkatasubramanian, Appl. Phys. Lett. 70, 2957 (1997). 10.1063/1.118755
33. G. Grimvall, Thermophysical Properties of Materials (North-Holland, Amsterdam, 1986).
34. J. Peng, Thermochemistry and constitution of precursor-derived Si-(B-)C-N ceramics., Ph.D. dissertation (Universitét Stuttgart, Max-Planck-Institut fr Metallforschung, Stuttgart, Germany, 2002).
35. T. Ya. Kosolapova, Handbook of High Temperature Compounds: Properties, Production, Applications (Hemisphere Publishing Corporation, New York, 1990).