Measurement of the thermal conductivity of nanometer scale thin films by thermoreflectance phenomenon

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1792-1796

  Kuwahara, M ^a   Suzuki, O ^a   Yamakawa, Y ^a   Taketoshi, N ^b   Yagi, T ^b   Fons, P ^a   Fukaya, T ^a   Tominaga, J ^a   Baba, T ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Nanometer thin film; Optical disk; Phase change memory; Thermal conductivity; Thermoreflectance

Indexed keywords

COMPUTER SIMULATION; HIGH TEMPERATURE EFFECTS; PHASE CHANGE MEMORY; REFLECTION; THERMAL CONDUCTIVITY;

NANOMETER THIN FILMS; OPTICAL DISKS; THERMAL SIMULATION; THERMOREFLECTANCE;

THIN FILMS;

EID: 34247626867     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.178     Document Type: Article

References (18)

1. Ovshinsky S. Phys. Rev. Lett. 21 (1968) 1450
2. Neale R. Electron. Eng. 67 (2001) 73
3. Wuttig M. Nature Mater. 4 (2005) 265
4. Lankhorst M.H.R., Ketelaars B.W.M.M., and Wolters R.A.M. Nature Mater. 4 (2005) 347
5. Kasami Y., Yasuda K., Ono M., Fukumoto A., and Kaneko M. Jpn. J. Appl. Phys. 35 (1996) 423
6. Kuwahara M., Shima T., Kolobov A., and Tominaga J. Jpn. J. Appl. Phys. 43 (2004) L8
7. Yamamoto M., Mori G., Tajima H., Takamori N., and Takahashi A. Jpn. J. Appl. Phys. 43 (2004) 4959
8. Tominaga J., Shima T., Kuwahara M., Fukaya T., Kolobov A., and Nakano T. Nanotechnology 15 (2004) 411
9. Kuwahara M., Shima T., Fons P., Fukaya T., and Tominaga J. J. Appl. Phys. 100 (2006) 043106
10. Kolobov A.V., Fons P., Frenkel A.I., Ankudinov A.L., Tomonaga J., and Uruga T. Nature Mater. 3 (2004) 703
11. Taketoshi N., Baba T., and Ono A. Meas. Sci. Technol. 12 (2001) 2064
12. T. Baba, in: Proceedings of the 10th International Workshop on Thermal Investigations of ICs and Systems (Therminic 2004), Sophia Antipolis, France, 2004.
13. Kuwahara M., Suzuki O., Taketoshi N., Yamakawa Y., Yagi T., Fons P., Tsutsumi K., Suzuki M., Fukaya T., Tominaga J., and Baba T. Jpn. J. Appl. Phys. 45 (2006) 1419
14. In: Lide D.R. (Ed). CRC Handbook of Chemistry and Physics. 78th ed. (1997), CRC Press, Boca Raton
15. M. Kuwahara, O. Suzuki, Y. Yamakawa, N. Taketoshi, T. Yagi, P. Fons, T. Fukaya, J. Tominaga, T. Baba, Jpn. J. Appl. Phys., accepted for publication.
16. Yamakawa Y., Kurihara K., Kuwahara M., Shima T., Nakano T., and Tominaga J. Jpn. J. Appl. Phys. 45 (2006) 1463
17. Okamine S., Hirasawa S., Terao M., and Miyauchi Y. Proc. SPIE 1663 (1992) 315
18. Refractive indices and specific heat capacities were measured by ourselves using a spectroscopic ellipsometer and differential scanning calorimeter, respectively.