Thermal conductivity measurement of submicron-thick films deposited on substrates by modified ac calorimetry (laser-heating ångstrom method)

International Journal of Thermophysics

Volumn 22, Issue 2, 2001, Pages 617-629

  Kato, R ^a   Maesono, A ^a   Tye, R P ^b  

^a Sinku Riko Inc   (Japan)

^b Hunters Lodge   (United Kingdom)

Author keywords

ngstrom method; Ac calorimetry; Aluminum nitride; Aluminum oxide; CD R; Thermal conductivity; Thermal diffusivity; Thin film

Indexed keywords

ALUMINUM NITRIDE; CALORIMETRY; DEPOSITION; LASER BEAM EFFECTS; OXIDES; SUBSTRATES; TECHNOLOGY; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL DIFFUSION IN SOLIDS;

AC CALORIMETRY; COMPOSITE THIN FILMS; ENERGY SOURCES; FILM THICKNESS;

THICK FILMS;

EID: 0011965246     PISSN: 0195928X     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1010745603645     Document Type: Article

References (20)

1. I. Hatta, Y. Gu, R. Kato, and A. Maesono, Thermal Conductivity 22, T. Tong, ed. (Technomic, Lancaster, PA, 1994), p. 461.
2. Ibid., p. 473.
3. R. Kato, A. Maesono, and R. P. Tye, Thermal Conductivity 24/Thermal Expansion 12, P. S. Gaal, ed. (Technomic, Lancaster, PA, 1999), p. 572.
4. J. E. Graebner, H. A. Altman, N. M. Balzaretti, R. Campbell, H. B. Chae, A. Degiovanni, R. Enck, A. Feldman, D. Fournier, J. Fricke, J. S. Geola, K. J. Gray, Y. Q. Gu, I. Hatta, T. M. Hartnett, R. E. Imhof, R. Kato, P. Koidl, P. K. Kuo, T. K. Lee, D. Maillet, B, Remy, J. P. Roger, D. J. Seong, R. P. Tye, H. Verhoeven, E. Worner, J. E. Yehoda, R. Zachai, and B. Zhang, Diamond Relat. Mater. 7:1589 (1998).
5. R. Kato, A. Maesono, and R. P. Tye, Proc. 1st Int. Conf. Thermophys. Prop. Mater., Singapore (1999), pp. 1-8.
6. I. Hatta, R. Kato, and A. Maesono, Proc. 2nd Asian Thermophysic. Prop. Conf. (1989), p. 133.
7. R. Kato, A. Maesono, and I. Hatta, Jpn. J. Appl. Phys. 32:3656 (1993).
8. I. Hatta, Y. Sasuga, R. Kato, and A. Maesono, Rev. Sci. Instrum. 56:1643 (1985).
9. I. Hatta, R. Kato, and A. Maesono, Jpn. J. Appl. Phys. 25:L493 (1986).
10. A. J. An̊gstrom, Ann. Phys. (Leipzig) 114:513 (1861).
11. Y. Gu, X. Tang, Y. Xu, and I. Hatta, Jpn. J. Appl. Phys. 32:L1365 (1993).
12. R. Kato, A. Maesono, R. P. Tye, and I. Hatta, Int. J. Thermophys. 20:977 (1999).
13. Y. Gu and I. Hatta, Jpn. J. Appl. Phys. 30:1295 (1991).
14. I. Hatta, R. Kato, and A. Maesono, Jpn. J. Appl. Phys. 26:475 (1987).
15. K. Fujii, A. Sakakibara, and I. Hatta, Proc. 19th Jpn. Symp. Thermophys. Prop. (1998), p. 220.
16. T. Morita, T. Yamamoto, T. Kurauchi, and M. Matsuura, J. Magnet. Soc. Jpn. 23:1161 (1999).
17. A. Einstein, Ann. Phys. (Leipzig) 35:679 (1911).
18. D. G. Cahill and R. O. Pohl, Solid Stale Commun. 70:927 (1989).
19. Y. S. Touloukian, R. W. Powell, C. Y. Ho, and M. C. Nicolau (eds.), Thermophysical Properties of Matter, Vol. 5 (Plenum Press, New York, 1973), p. 1233.
20. Y. S. Touloukian, R. W. Powell, C. Y. Ho, and M. C. Nicolau (eds.), Thermophysical Properties of Matter, Vol. 10 (Plenum Press, New York, 1973), p. 437.