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Applied Physics Letters

Volumn 93, Issue 26, 2008, Pages

Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications

(3) Satyanarayana, N a Lau, K H a Sinha, S K a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BUILDING MATERIALS; ELECTROMECHANICAL DEVICES; ESTERS; FILMS; MATERIALS PROPERTIES; MECHANICAL PROPERTIES; MEMS; MICROELECTROMECHANICAL DEVICES; PLASMA APPLICATIONS; PLASMAS;

MICRO-ELECTRO-MECHANICAL SYSTEMS; NANOTEXTURED SURFACES; ORDERS OF MAGNITUDES; OVERCOATING; PERFLUOROPOLYETHER; PLASMA TREATMENTS; PMMA FILMS; POLIES (METHYL METHACRYLATE); STRUCTURAL MATERIALS; TRIBOLOGICAL PERFORMANCES; ULTRATHIN LAYERS; WEAR LIVES;

PHOTORESISTS;

EID: 58149233819 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3062847 Document Type: Article

Times cited : (28)

References (13)

1
- 58149232694
- J. -C. Eloy and E. Mounier, Semicond. Int. 31, 70 (2008).
- (2008) Semicond. Int. , vol.31 , pp. 70
- Eloy, J.-C.¹ Mounier, E.²

2
- 0037064328
- 0003-2670
- S. A. Soper, A. C. Henry, B. Vaidya, M. Galloway, M. Wabuyele, and R. L. McCarley, Anal. Chim. Acta 470, 87 (2002). 0003-2670
- (2002) Anal. Chim. Acta , vol.470 , pp. 87
- Soper, S.A.¹ Henry, A.C.² Vaidya, B.³ Galloway, M.⁴ Wabuyele, M.⁵ McCarley, R.L.⁶

3
- 34247200604
- 0928-4931
- R. A. Singh, E. S. Yoon, H. J. Kim, J. Kim, H. E. Jeong, and K. Y. Suh, Mater. Sci. Eng., C 27, 875 (2007). 0928-4931
- (2007) Mater. Sci. Eng., C , vol.27 , pp. 875
- Singh, R.A.¹ Yoon, E.S.² Kim, H.J.³ Kim, J.⁴ Jeong, H.E.⁵ Suh, K.Y.⁶

4
- 25444505196
- 0304-3991
- N. S. Tambe and B. Bhushan, Ultramicroscopy 105, 238 (2005). 0304-3991
- (2005) Ultramicroscopy , vol.105 , pp. 238
- Tambe, N.S.¹ Bhushan, B.²

5
- 33947497009
- 0957-4484 10.1088/0957-4484/18/12/125304.
- N. Vourdas, A. Tserepi, and E. Gogolides, Nanotechnology 0957-4484 10.1088/0957-4484/18/12/125304 18, 125304 (2007).
- (2007) Nanotechnology , vol.18 , pp. 125304
- Vourdas, N.¹ Tserepi, A.² Gogolides, E.³

6
- 24644511084
- 0022-3727 10.1088/0022-3727/38/18/029.
- N. Satyanarayana and S. K. Sinha, J. Phys. D 0022-3727 10.1088/0022-3727/38/18/029 38, 3512 (2005).
- (2005) J. Phys. D , vol.38 , pp. 3512
- Satyanarayana, N.¹ Sinha, S.K.²

7
- 34347237275
- 1478-6435
- N. Satyanarayana, N. N. Gosvami, S. K. Sinha, and M. P. Srinivasan, Philos. Mag. 87, 3209 (2007). 1478-6435
- (2007) Philos. Mag. , vol.87 , pp. 3209
- Satyanarayana, N.¹ Gosvami, N.N.² Sinha, S.K.³ Srinivasan, M.P.⁴

8
- 0037374687
- 0301-679X 10.1016/S0301-679X(02)00190-1.
- S. K. Sinha, M. Kawaguchi, T. Kato, and F. E. Kennedy, Tribol. Int. 0301-679X 10.1016/S0301-679X(02)00190-1 36, 217 (2003).
- (2003) Tribol. Int. , vol.36 , pp. 217
- Sinha, S.K.¹ Kawaguchi, M.² Kato, T.³ Kennedy, F.E.⁴

9
- 34347222946
- 1023-8883
- N. Satyanarayana, K. S. Skandesh Rajan, S. K. Sinha, and L. Shen, Tribol. Lett. 27, 181 (2007). 1023-8883
- (2007) Tribol. Lett. , vol.27 , pp. 181
- Satyanarayana, N.¹ Skandesh Rajan, K.S.² Sinha, S.K.³ Shen, L.⁴

10
- 0027641068
- 0142-9612
- I. K. Kang, B. K. Kwon, J. H. Lee, and H. B. Lee, Biomaterials 14, 787 (1993). 0142-9612
- (1993) Biomaterials , vol.14 , pp. 787
- Kang, I.K.¹ Kwon, B.K.² Lee, J.H.³ Lee, H.B.⁴

11
- 33646741631
- 0957-4484
- D. R. Tokachichu and B. Bhushan, IEEE Trans. Nanotechnol. 5, 228 (2006). 0957-4484
- (2006) IEEE Trans. Nanotechnol. , vol.5 , pp. 228
- Tokachichu, D.R.¹ Bhushan, B.²

12
- 9744281904
- 0957-4484 10.1088/0957-4484/15/11/033.
- N. S. Tambe and B. Bhushan, Nanotechnology 0957-4484 10.1088/0957-4484/ 15/11/033 15, 1561 (2004).
- (2004) Nanotechnology , vol.15 , pp. 1561
- Tambe, N.S.¹ Bhushan, B.²

13
- 0035393112
- 0734-2101 10.1116/1.1382650.
- H. Lim, Y. Lee, S. Han, J. Cho, and K. -J. Kim, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1382650 19, 1490 (2001).
- (2001) J. Vac. Sci. Technol. A , vol.19 , pp. 1490
- Lim, H.¹ Lee, Y.² Han, S.³ Cho, J.⁴ Kim, K.-J.⁵

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