Friction behaviour of diamond-like carbon films with varying mechanical properties

Surface and Coatings Technology

Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 4348-4351

  Singh, R Arvind ^a   Yoon, Eui Sung ^a   Kim, Hong Joon ^a   Kong, Hosung ^a   Park, Se Jun ^a   Lee, Kwang Ryeol ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Carbon; Elastic properties; Friction; PACVD; SEM

Indexed keywords

CONTACT ANGLE; ELASTIC MODULI; FRICTION; MECHANICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; THICK FILMS; TRIBOLOGY;

BALL-ON-FLAT TYPE MICRO-TRIBOTESTER; RADIO FREQUENCY PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION; SODA LIME GLASS BALLS;

DIAMOND LIKE CARBON FILMS;

CONTACT ANGLE; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; FRICTION; MECHANICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; THICK FILMS; TRIBOLOGY;

EID: 33751216768     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.055     Document Type: Article

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