Bio-inspired dual surface modification to improve tribological properties at small-scale

Applied Surface Science

Volumn 255, Issue 9, 2009, Pages 4821-4828

  Singh, R Arvind ^a   Pham, Duc Cuong ^a   Kim, Jinseok ^a   Yang, Sungwook ^a   Yoon, Eui Sung ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Friction; Micro; Photolithography; Surface modification; Tribology; Wear

Indexed keywords

CARBON FILMS; DIAMOND LIKE CARBON FILMS; FRICTION; PHOTOLITHOGRAPHY; SILICON WAFERS; SURFACE TREATMENT; TRIBOLOGY; WEAR OF MATERIALS;

COMBINED SURFACE TREATMENT; MICRO; MINIATURIZED DEVICES; SMALL SCALE DEVICES; SURFACE CHARACTERISTICS; TOPOGRAPHICAL MODIFICATIONS; TRIBOLOGICAL APPLICATIONS; TRIBOLOGICAL PROPERTIES;

CHEMICAL MODIFICATION;

EID: 60249088905     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.12.004     Document Type: Article

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