A hard graphitelike hydrogenated amorphous carbon grown at high deposition rate (>15 nms)

Applied Physics Letters

Volumn 92, Issue 22, 2008, Pages

  Singh, S V ^a   Creatore, M ^a   Groenen, R ^b   Van Hege, K ^b   Van De Sanden, M C M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Bekaert sa   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CARBON; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; HYDROGENOLYSIS; INFRARED SPECTROSCOPY; SCALE (DEPOSITS); SPUTTER DEPOSITION;

HIGH DEPOSITION RATES; HYDROGENATED AMORPHOUS CARBON (A C:H); INFRA RED ABSORPTION SPECTRA;

AMORPHOUS CARBON;

EID: 44849098572     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2938056     Document Type: Article

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