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Journal of Materials Science

Volumn 43, Issue 2, 2008, Pages 645-651

Effect of deposition pressure on the adhesion and tribological properties of a-CN x H films prepared by DC-RF-PECVD

(4) Ding, Jun a,b Hao, Junying a Xue, Qunji a Liu, Weimin a

a LANZHOU INSTITUTE OF CHEMICAL PHYSICS (China)

b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; BOND STRENGTH (MATERIALS); ELASTIC MODULI; HYDROGENATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SINGLE CRYSTALS; SURFACE ROUGHNESS;

DEPOSITION PRESSURE; FILM DEPOSITION; TRIBOLOGICAL PROPERTIES;

THIN FILMS;

EID: 37249082588 PISSN: 00222461 EISSN: 15734803 Source Type: Journal
DOI: 10.1007/s10853-007-2149-x Document Type: Conference Paper

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.