MEMS platform for on-chip nanomechanical experiments with strong and highly ductile nanofibers

Journal of Micromechanics and Microengineering

Volumn 20, Issue 12, 2010, Pages

  Naraghi, M ^a,c   Ozkan, T ^a   Chasiotis, I ^a   Hazra, S S ^b   De Boer, M P ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMB DRIVE; DIGITAL IMAGE CORRELATIONS; ELECTROSPUNS; MECHANICAL BEHAVIOR; MECHANICAL CHARACTERIZATIONS; MECHANICAL PROPERTY MEASUREMENTS; MEMS PLATFORM; NANO SCALE; NANO-MATERIALS; NANOMECHANICAL TESTING; OFF-CHIP; ON CHIPS; ON-CHIP ACTUATION; OPTICAL IMAGING; POLYACRYLONITRILE NANOFIBERS; SURFACE MICROMACHINED MEMS; TESTING METHOD; TESTING PLATFORMS; THERMAL ACTUATOR;

ABILITY TESTING; ACTUATORS; BEHAVIORAL RESEARCH; MECHANICAL DRIVES; MECHANICAL ENGINEERING; MECHANICAL PROPERTIES; MICROMACHINING; NANOFIBERS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; OPTICAL CORRELATION; POLYACRYLONITRILES; SURFACE TESTING; TENSILE TESTING;

HIGH RESOLUTION ELECTRON MICROSCOPY;

EID: 78649780842     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/125022     Document Type: Article

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