Frequency-dependent electrostatic actuation in microfluidic MEMS

Journal of Microelectromechanical Systems

Volumn 14, Issue 1, 2005, Pages 125-133

  Sounart, Thomas L ^a   Michalske, Terry A ^a   Zavadil, Kevin R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Actuators; Comb drive; Double layer; Electrode polarization; Water

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTROCHEMISTRY; ELECTROLYTES; FLUIDIC DEVICES; FREQUENCY RESPONSE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OXIDES; PERMITTIVITY; POLARIZATION; SILICON; WATER;

COMB DRIVE; DOUBLE LAYER; ELECTRODE POLARIZATION; MICROFLUIDIC MEMS;

ELECTROSTATIC ACTUATORS;

EID: 14044266257     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839006     Document Type: Article

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